Department of Electrical Engineering and Automation

Electronics Integration and Reliability

The research in the Electronics Integration and Reliability (EILB) is focused on new materials, heterogeneous integration, reliability, and sustainability of electronics. The multi-material concepts and technologies we develop will be of central importance in the realization of almost any ubiquitous electronics and miniaturized smart systems in applications ranging from minimally invasive surgery to autonomous driving.
EILB group

EILB group is located in Otakaari 5 and Micronova (www.micronova.fi) and uses the cutting-edge infrastructure of OtaNano, providing centralized access to advanced nanofabrication, nanomicroscopy and low-noise measurement facilities. In addition, the group has its own reliability testing laboratory including equipment for environmental, mechanical, thermomechanical and electrical testing, and uses different modelling tools to anticipate and rationalize reliability performance of heterogeneous integration in micro- and nanosystems.

State-of-the-Art Facilities

The intensive co-operation of EILB with numerous semiconductor, electronics and MEMS manufacturing companies facilitates the comprehensive training of our students to combine scientific knowledge with industry-relevant technological advancement.

Interconnects

Examples of our recent research from large international Public-Private-Partnership projects currently running are:

PowerizeD is an innovative EU funded project aiming to develop breakthrough technologies of digitized and intelligent power electronics to enable sustainable and resilient energy generation, transmission and applications. https://powerized.eu/index.php

Our group is contributing in PowerizeD with multiple objectives: 

(a) Implementation of high temperature die attach materials in power modules for increased reliability and product durability. 
(b) Assessment of resource efficiency in different power modules and power systems.
(c) Development of high thermal performance compound semiconductor substrate Alternate Silicon on Insulator (A-SOI).

Research to Business (R2B) funding is intended for public research organizations for projects in which research groups and researchers aim to develop their research into new business and to commercialize their research results.

MEMS Modules

Here the group is developing a novel 3D piezoMEMS which is an advance piezoelectric MEMS sensor capable of full 3D motion and sensing. This is enabled by depositing AlN on the vertical and horizontal surfaces of a MEMS element, giving the design fully unhindered 3D-motion.

Future Makers 2023 aim is towards building long-term sustainable renewal and new business models for the Finnish technology industry. The target of our project is to merge two meticulously developed technological platforms within the EILB group – 3D piezoMEMS and solid liquid interdiffusion (SLID) bonding. The focus is on integrating 3D piezoMEMS wafers with through silicon via (TSV) wafers to demonstrate wafer level packaging.

Recent doctoral dissertations from the EILB group include “Development of piezoelectric microelectromechanical systems for multiaxial motion and sensing” by K. Bespalova Development of piezoelectric microelectromechanical systems for multiaxial motion and sensing (aalto.fi) and “Deposition and characterization of aluminum nitride thin films for piezoelectric MEMS” by E. Österlund Deposition and characterization of aluminum nitride thin films for piezoelectric MEMS (aalto.fi).

Our teaching is part of two master’s programs – Automation and Electrical Engineering (AEE) and Joint International Master in Smart Systems Integrated Solutions (SSIs), and includes e.g. the following courses:
•    ELEC-E8712 Design for Reliability
•    ELEC-E8714 Sustainable Electronics
•    ELEC-E8715 Design and Analysis of MEMS
•    ELEC-E8716 Heterogeneous Integration

For more information, please contact:
•    Prof. Mervi Paulasto-Kröckel (mervi.paulasto@aalto.fi),
•    Principal University Lecturer, Dr. Vesa Vuorinen (vesa.vuorinen@aalto.fi), 
•    Academy Research Fellow, Dr. Glenn Ross (glenn.ross@aalto.fi), or
•    Postdoctoral Fellow, Dr. Nikhilendu Tiwary (nikhilendu.tiwary@aalto.fi).

Latest publications

Enhanced Vertical Sidewall Quality for Functional AlN Films in 3D Piezo MEMS Applications

Arsam Ali, Glenn Ross, Mervi Paulasto-Kröckel 2025 Advanced Electronic Materials

Low-temperature SLID-TSV Interconnects for 3D (MEMS) Packaging

Fahimeh Emadi, Shenyi Liu, Vesa Vuorinen, Mervi Paulasto-Krockel 2025 IEEE Transactions on Components, Packaging and Manufacturing Technology

Facilitating Small-Pitch Interconnects with Low-Temperature Solid-Liquid Interdiffusion Bonding

O. Golim, V. Vuorinen, M. Paulasto-Krockel 2025 IEEE Transactions on Components, Packaging and Manufacturing Technology

Early detection of wire bond degradation in IGBT modules using on-chip junction temperature sensor

Joonas Leppanen, Atte Hoffren, Tapio Leppanen, Eeli Kerttula, Shenyi Liu, Vesa Vuorinen, Mervi Paulasto-Kröckel 2025 IEEE Transactions on Power Electronics

Comparison and Optimization of SLID Bonding for Die-attach on Various Substrate Types in Power Module Packaging Applications

Shenyi Liu, Vesa Vuorinen, Jannis Schuh, Jurgen Albrecht, Mervi Paulasto-Krockel 2025 IEEE Transactions on Components, Packaging and Manufacturing Technology

Thermally Conductive Buried Aluminum Nitride for Next Generation Silicon-on-Insulator

Josef Stevanus Matondang, Nikhilendu Tiwary, Glenn Ross, Mervi Paulasto-Kröckel 2025 Advanced Electronic Materials

Cradle-to-Gate Life Cycle Assessment of Si IGBT and SiC MOSFET Power Modules

Mostafa Radwan, Mervi Paulasto-Krockel, Vesa Vuorinen 2025 2025 IEEE Conference on Technologies for Sustainability, SusTech 2025

Life Cycle Assessment as an Eco-Design Tool in Power Electronics: A Case Study of 1.2 kV Si IGBT vs SiC MOSFET Modules in Motor Drive Inverter

Mostafa Radwan, Hossein Sadegh Lafmejani, Mervi Paulasto-Kröckel, Joonas Leppänen, Vesa Vuorinen, Marko Hinkkanen 2025 2025 Energy Conversion Congress & Expo Europe (ECCE Europe)

Metalorganic Chemical Vapor Deposition of AlN on High Degree Roughness Vertical Surfaces for MEMS Fabrication

Kristina Bespalova, Glenn Ross, Sami Suihkonen, Mervi Paulasto-Kröckel 2024 Advanced Electronic Materials

Recent Advances of VO2 in Sensors and Actuators

Mahmoud Darwish, Yana Zhabura, László Pohl 2024 Nanomaterials
More information on our research in the Aalto research portal.
Research portal
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