Mervi Paulasto-Kröckel

Professor
Professor
T410 Dept. Electrical Engineering and Automation
Full researcher profile
https://research.aalto.fi/...

Honors and awards

JVST A Best ALD Paper Award

Award for paper "Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls, by Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen and Mervi Paulasto-Kröckel, JVST A 39, 032403 (2021)"
Award or honor granted for a specific work Department of Chemistry and Materials Science Jun 2021

Best paper award

Award or honor granted for a specific work Department of Electrical Engineering and Automation Oct 2000

Research groups

  • Electronics Integration and Reliability

Publications

Enhanced Vertical Sidewall Quality for Functional AlN Films in 3D Piezo MEMS Applications

Arsam Ali, Glenn Ross, Mervi Paulasto-Kröckel 2025 Advanced Electronic Materials

Low-temperature SLID-TSV Interconnects for 3D (MEMS) Packaging

Fahimeh Emadi, Shenyi Liu, Vesa Vuorinen, Mervi Paulasto-Krockel 2025 IEEE Transactions on Components, Packaging and Manufacturing Technology

Facilitating Small-Pitch Interconnects with Low-Temperature Solid-Liquid Interdiffusion Bonding

O. Golim, V. Vuorinen, M. Paulasto-Krockel 2025 IEEE Transactions on Components, Packaging and Manufacturing Technology

Early detection of wire bond degradation in IGBT modules using on-chip junction temperature sensor

Joonas Leppanen, Atte Hoffren, Tapio Leppanen, Eeli Kerttula, Shenyi Liu, Vesa Vuorinen, Mervi Paulasto-Kröckel 2025 IEEE Transactions on Power Electronics

Comparison and Optimization of SLID Bonding for Die-attach on Various Substrate Types in Power Module Packaging Applications

Shenyi Liu, Vesa Vuorinen, Jannis Schuh, Jurgen Albrecht, Mervi Paulasto-Krockel 2025 IEEE Transactions on Components, Packaging and Manufacturing Technology

Thermally Conductive Buried Aluminum Nitride for Next Generation Silicon-on-Insulator

Josef Stevanus Matondang, Nikhilendu Tiwary, Glenn Ross, Mervi Paulasto-Kröckel 2025 Advanced Electronic Materials

Cradle-to-Gate Life Cycle Assessment of Si IGBT and SiC MOSFET Power Modules

Mostafa Radwan, Mervi Paulasto-Krockel, Vesa Vuorinen 2025 2025 IEEE Conference on Technologies for Sustainability, SusTech 2025

Metalorganic Chemical Vapor Deposition of AlN on High Degree Roughness Vertical Surfaces for MEMS Fabrication

Kristina Bespalova, Glenn Ross, Sami Suihkonen, Mervi Paulasto-Kröckel 2024 Advanced Electronic Materials

Novel low-temperature interconnects for 2.5/3D MEMS integration: demonstration and reliability

Fahimeh Emadi, Vesa Vuorinen, Shenyi Liu, Mervi Paulasto-Krockel 2024 IEEE Transactions on Components, Packaging and Manufacturing Technology

Scaling of piezoelectric in-plane NEMS : Towards nanoscale integration of AlN-based transducer on vertical sidewalls

Artem Gabrelian, Ville Miikkulainen, Glenn Ross, Mervi Paulasto-Kröckel 2024 Materials and Design