Mervi Paulasto-Kröckel

Professor
Professor
T410 Dept. Electrical Engineering and Automation
Full researcher profile
https://research.aalto.fi/...

Contact information

Phone number
+358505113197

Honors and awards

Best paper award

Award or honor granted for a specific work Department of Electrical Engineering and Automation Oct 2000

JVST A Best ALD Paper Award

Award for paper "Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls, by Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen and Mervi Paulasto-Kröckel, JVST A 39, 032403 (2021)"
Award or honor granted for a specific work Department of Chemistry and Materials Science Jun 2021

Research groups

  • Electronics Integration and Reliability

Publications

Achieving low-temperature wafer level bonding with Cu-Sn-In ternary at 150 °C

Obert Golim, Vesa Vuorinen, Glenn Ross, Tobias Wernicke, Marta Pawlak, Nikhilendu Tiwary, Mervi Paulasto-Kröckel 2022 Scripta Materialia

Finite element simulation of solid-liquid interdiffusion bonding process

Nikhilendu Tiwary, Vesa Vuorinen, Glenn Ross, Mervi Paulasto-Krockel 2022 IEEE Transactions on Components, Packaging and Manufacturing Technology

Joint International Master in Smart Systems Integrated Solutions

Knut E. Aasmundtveit, Changhai Wang, Marta Rencz, Mervi Paulasto-Kröckel, Kristin Imenes, Marc Desmulliez, Ferenc Ender, Vesa Vuorinen 2021 Proceedings of Smart Systems Integration Conference, SSI 2021

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Kristina Bespalova, Elmeri österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala 2021 Journal of Microelectromechanical Systems

Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon

Hongqun Dong, Xiaoma Tao, Mervi Paulasto-Kröckel 2021 Journal of Electronic Materials

Low-temperature Metal Bonding for Optical Device Packaging

Obert Golim, Vesa Vuorinen, Nikhilendu Tiwary, Glenn Ross, Mervi Paulasto-Kröckel 2021 Proceedings of 23rd European Microelectronics and Packaging Conference & Exhibition, EMPC 2021

Aluminum Nitride to Silicon Direct Bonding for an Alternative Silicon-On-Insulator Platform

Jani Kaaos, Glenn Ross, Mervi Paulasto-Kröckel 2021 ACS applied materials & interfaces

A humidity-induced novel failure mechanism in power semiconductor diodes

J. Leppänen, G. Ross, V. Vuorinen, J. Ingman, J. Jormanainen, M. Paulasto-Kröckel 2021 Microelectronics Reliability

Demonstrating 170°C Low Temperature Cu-In-Sn wafer level Solid Liquid Interdiffusion Bonding

Vesa Vuorinen, Glenn Ross, Anton Klami, Hongqun Dong, Mervi Paulasto-Kröckel, Tobias Wernicke, Anneliese Pönninger 2021 IEEE Transactions on Components, Packaging and Manufacturing Technology