Kristina Bespalova

Kristina Bespalova

Project Specialist
Project Specialist
T410 Dept. Electrical Engineering and Automation
Full researcher profile
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Areas of expertise

piezoelectric, MEMS, Thin film technology, Thin films, aluminum nitride, AlN

Honors and awards

JVST A Best ALD Paper Award

Award for paper "Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls, by Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen and Mervi Paulasto-Kröckel, JVST A 39, 032403 (2021)"
Award or honor granted for a specific work Department of Chemistry and Materials Science Jun 2021

Research groups

  • Electronics Integration and Reliability, Project Employee


Metalorganic Chemical Vapor Deposition of AlN on High Degree Roughness Vertical Surfaces for MEMS Fabrication

Kristina Bespalova, Glenn Ross, Sami Suihkonen, Mervi Paulasto-Kröckel 2024 Advanced Electronic Materials

In-Plane AlN-based Actuator: Toward a New Generation of Piezoelectric MEMS

Kristina Bespalova, Tarmo Nieminen, Artem Gabrelian, Glenn Ross, Mervi Paulasto-Kröckel 2023 Advanced Electronic Materials

Unlocking the Potential of Piezoelectric Films Grown on Vertical Surfaces for Inertial MEMS

Gabrelian Gabrelian, Glenn Ross, Kristina Bespalova, Mervi Paulasto-Kröckel 2022 Materials Today Communications

Effect of crystal structure on the Young's modulus of GaP nanowires

Prokhor A. Alekseev, Bogdan R. Borodin, Pavel Geydt, Vladislav Khayrudinov, Kristina Bespalova, Demid A. Kirilenko, Rodion R. Reznik, Alexey Nashchekin, Tuomas Haggren, Erkki Lahderanta, George E. Cirlin, Harri Lipsanen, Mikhail S. Dunaevskiy 2021 Nanotechnology

Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication

Kristina Bespalova, Elmeri österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala 2021 Journal of Microelectromechanical Systems

Atomic layer deposition of AlN using atomic layer annealing - Towards high-quality AlN on vertical sidewalls

Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen, Mervi Paulasto-Kröckel 2021 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

Kristina Bespalova, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Sebastian Thanniyil, Cyril Karuthedath, Stefan Mertin, Tuomas Pensala 2020 Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020