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Public defence in Electronics Integration and Reliability, M.Sc. Kristina Bespalova

Exploring advanced piezoelectric microelectromechanical systems (MEMS) design for sensing & motion in multiple directions, developing microfabrication technology
- Public defence from the Aalto University School of Electrical Engineering, Department of Electrical Engineering and Automation
Metalorganic vapour-phase epitaxy reactor with a Si wafer inside; Si wafer with fabricated in-plane AlN-based piezoelectric MEMS

The title of the thesis: Development of piezoelectric microelectromechanical systems for multiaxial motion and sensing

Doctoral student: Kristina Bespalova
Opponent: Prof. Lina Sarro, TU Delft, The Netherlands
Custos: Prof. Mervi Paulasto-Kröckel, Aalto University School of Electrical Engineering, Department of Electrical Engineering and Automation 

Microelectromechanical systems (MEMS) are integrated in a wide range of application fields. They are commonly used in consumer, industrial, telecommunications, automotive, medical, defense, and aerospace markets. This study is advancing MEMS technology to enable precise motion and sensing in multiple directions, mainly focusing on in-plane or lateral motion development. Its relevance to other research in the field lies in its contribution to expanding the capabilities of microscale devices, providing lower power consumption meanwhile maintaining compact integration density and competitive performance. The main result of the study is the fabrication of MEMS actuator capable of motion in-plane direction via the piezoelectric effect of aluminum nitride (AlN) thin film deposited on the vertical sidewalls of a Si cantilever. 

This research brings new insights into the design and application of piezoelectric materials, pushing the boundaries of microscale technology. The results of the research find wide-ranging applications in robotics, biomedicine, aerospace, and consumer electronics, where precise motion and sensing are crucial. In conclusion, this study highlights the potential of piezoelectric MEMS and thin film deposition on vertical surfaces to revolutionize various industries, paving the way for innovative solutions in motion, sensing, and beyond.

Keywords: Aluminium nitride, microelectromechanical systems, metal organic chemical vapour deposition, vertical sidewalls, vertical surfaces, aluminium scandium nitride, piezoelectric materials, piezoelectricity, microstructure, thin films, X-ray diffraction, microfabrication, scanning transmission electron microscopy, finite-element method, surface quality, cavity first approach, motion test.

Thesis available for public display 10 days prior to the defence at: https://aaltodoc.aalto.fi/doc_public/eonly/riiputus/

Contact:

Email  [email protected]
Mobile  +358504127838


Doctoral theses in the School of Electrical Engineering: https://aaltodoc.aalto.fi/handle/123456789/53

Zoom Quick Guide: https://www.aalto.fi/en/services/zoom-quick-guide

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