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Defence in the field of Semiconductor Technology M. Sc. (Tech.) Zhen Zhu

Title of the thesis is “Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Silicon Dioxide and Aluminum Oxide”

Opponent: Professor Henrik Pedersen, Linköping University, Sweden

Supervisor:  Professor Hele Savin, Aalto University School of Electrical Engineering, Department of Electronics and Nanoengineering.

The dissertation is publicly displayed 10 days before the defence at the noticeboard of the School of Electrical Engineering in Maarintie 8, Espoo.

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