Department of Chemistry and Materials Science

Microfabrication

The group develops micro- and nanofabrication processes for applications in fluidic, chemical, biological, mechanical and thermal devices.
Micronova_cleanroom research

Our research areas:

  1. Micro- and nanofabrication

  2. Microfluidics and wetting

  3. Coatings and surface treatments

We employ a wide range of micro- and nanofabrication tools at Aalto Nanofab to create structures, devices and surfaces for fluidic, thermal, and biological applications. We have projects on neurons-on-a-chip (MEAs, carbon microelectrodes, dopamine analysis), carbon-MEMS (pyrolytic SU-8), superhydrophobic surfaces (blood repellency, icephobicity, antifouling and oleophobicity), foam materials (thermal insulation), single cell trapping (patterned superhydrophobic surfaces), flexible devices (metallization of elastomers).

Silicon research

Materials we work with:

  • Silicon (bulk and SOI), Pyrex, Kapton, Aluminum as substrates
  • AZ positive resists (also with image reversal), SU-8 and NXT15 negative resists
  • PDMS and thiolenes for replica moulding
  • Plasma Teflon and spin coated CYTOP for hydrophobic coatings
  • SAMs made by wet and dry techniques
  • Plasma deposited carbon materials (DLC, nc-C, ta-C)
  • UV-sensitive sol-gel materials (SiO2, Al2O3)
  • ALD films: TiO2, SiO2, Al2O3, TiN, NbN, Pt, nanolaminates
  • Metals (Al, Cr, Cu, W, Pt) by sputtering and evaporation

Our research through images:

CHEM_Microfabrication grup_Cu-PDMS superhydrophobic with 5 liquids

Cu-PDMS superhydrophobic with 5 liquids

CHEM_Microfabrication group_polarr

PolarR

CHEM_Microfabrication group_Radial arrays

Radial arrays

CHEM_Microfabrication gropu_Korea NC MEA

Korea NC MEA

CHEM_Microfabrication group_MEA pillars schematic 3D

MEA pillars schematic 3D

CHEM_Microfabrication group_MicroPESI and coin

MicroPESI and coin

CHEM_Microfabrication group_Nebulizer chips packaged

Nebulizer chips packaged

CHEM_Microfabrication group_Serif-T mushrooms

Serif-T mushrooms

CHEM_Microfabrication group_SU-8 ESI array with coin

SU-8 ESI array with coin

CHEM_Microfabrication group_Wafer with SU-8 separation chips

Wafer with SU-8 separation chips

CHEM_Microfabrication group_Woodpile of PLA

Woodpile of PLA

CHEM_Microfabrication group_ZnO ALD coated AAAO

ZnO ALD coated AAAO

Micronova Cleanroom

Our work at Micronova cleanroom

We work on silicon, glass and polymer technologies, utilizing the Micronova cleanroom. Micronova is the largest research cleanroom in northern Europe with its 2600 m2 of class 10-class 1000 space, shared between VTT and Aalto University. Micronova is equipped with a wide range of processing tools for MEMS, CMOS, III-V and polymer technologies.

Micronova cleanroom equipment

Examples of our equipment:

  • optical lithography with backside alignment (Süss MA-6)
  • DRIE (Oxford 100 cryo and STS Bosch) and RIE (Oxford 80)
  • PECVD (Oxford 80)
  • ALD (Picosun R200 and Beneq TFS 500 thermal and Beneq TFS 500 plasma)
  • sputtering (various tools) and evaporation (various tools)
  • Centrotherm tube furnaces (thermal oxidation, LPCVD poly, LPCVD nitride)
  • AML bonder/nanoimprint

For a complete list of equipment, see: http://www.micronova.fi/nanofabrication_centre-002/equipment/

Research group members:

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Latest publications:

Effect of the roughness of steel fibre surface on its wettability and the cement paste close to fibre surface

Anna Antonova, Marika Eik, Ville Jokinen, Jari Puttonen 2021 Construction and Building Materials

Inkjet-printed flexible silver electrodes on thiol-enes

Eero Kuusisto, Joonas J. Heikkinen, Päivi Järvinen, Ville Jokinen 2021 Sensors and Actuators B: Chemical

Slippery and magnetically responsive micropillared surfaces for manipulation of droplets and beads

Anas Al-Azawi, Christoph Horenz, Topi Tupasela, Olli Ikkala, Ville Jokinen, Sami Franssila, Robin H. A. Ras 2020 AIP ADVANCES

A microfluidic chip architecture enabling a hypoxic microenvironment and nitric oxide delivery in cell culture

Samineh Barmaki, Daniela Obermaier, Esko Kankuri, Jyrki Vuola, Sami Franssila, Ville Jokinen 2020 MICROMACHINES

Fabrication and design rules of three dimensional pyrolytic carbon suspended microstructures

Joonas J. Heikkinen, Janez Košir, Ville Jokinen, Sami Franssila 2020 Journal of Micromechanics and Microengineering

Superhydrophobic Antireflection Coating on Glass Using Grass-like Alumina and Fluoropolymer

Kirill Isakov, Christoffer Kauppinen, Sami Franssila, Harri Lipsanen 2020 ACS applied materials & interfaces

Novel carbon film induces precocious calcium oscillation to promote neuronal cell maturation

Anastasia Ludwig, Sebnem Kesaf, Joonas J. Heikkinen, Tatiana Sukhanova, Shokoufeh Khakipoor, Florence Molinari, Christophe Pellegrino, Sung I. Kim, Jeon G. Han, Henri J. Huttunen, Sari E. Lauri, Sami Franssila, Ville Jokinen, Claudio Rivera 2020 Scientific Reports

Biofouling affects the redox kinetics of outer and inner sphere probes on carbon surfaces drastically differently - implications to biosensing

Emilia Peltola, Anja Aarva, Sami Sainio, Joonas J. Heikkinen, Niklas Wester, Ville Jokinen, Jari Koskinen, Tomi Laurila 2020 Physical chemistry chemical physics : PCCP

Fabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carbon

Joonas J. Heikkinen, Emilia Peltola, Niklas Wester, Jari Koskinen, Tomi Laurila, Sami Franssila, Ville Jokinen 2019 MICROMACHINES
More information on our research in the Research database.
Research database
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