Department of Chemistry and Materials Science


The group develops micro- and nanofabrication processes for applications in fluidic, chemical, biological, mechanical and thermal devices.
Micronova_cleanroom research

Our research areas:

  1. Micro- and nanofabrication

  2. Microfluidics and wetting

  3. Coatings and surface treatments

We employ a wide range of micro- and nanofabrication tools at Aalto Nanofab to create structures, devices and surfaces for fluidic, thermal, and biological applications. We have projects on neurons-on-a-chip (MEAs, carbon microelectrodes, dopamine analysis), carbon-MEMS (pyrolytic SU-8), superhydrophobic surfaces (blood repellency, icephobicity, antifouling and oleophobicity), foam materials (thermal insulation), single cell trapping (patterned superhydrophobic surfaces), flexible devices (metallization of elastomers).

Silicon research

Materials we work with:

  • Silicon (bulk and SOI), Pyrex, Kapton, Aluminum as substrates
  • AZ positive resists (also with image reversal), SU-8 and NXT15 negative resists
  • PDMS and thiolenes for replica moulding
  • Plasma Teflon and spin coated CYTOP for hydrophobic coatings
  • SAMs made by wet and dry techniques
  • Plasma deposited carbon materials (DLC, nc-C, ta-C)
  • UV-sensitive sol-gel materials (SiO2, Al2O3)
  • ALD films: TiO2, SiO2, Al2O3, TiN, NbN, Pt, nanolaminates
  • Metals (Al, Cr, Cu, W, Pt) by sputtering and evaporation

Our research through images:

    CHEM_Microfabrication grup_Cu-PDMS superhydrophobic with 5 liquids

    Cu-PDMS superhydrophobic with 5 liquids

    CHEM_Microfabrication group_polarr


    CHEM_Microfabrication group_Radial arrays

    Radial arrays

    CHEM_Microfabrication gropu_Korea NC MEA

    Korea NC MEA

    CHEM_Microfabrication group_MEA pillars schematic 3D

    MEA pillars schematic 3D

    CHEM_Microfabrication group_MicroPESI and coin

    MicroPESI and coin

    CHEM_Microfabrication group_Nebulizer chips packaged

    Nebulizer chips packaged

    CHEM_Microfabrication group_Serif-T mushrooms

    Serif-T mushrooms

    CHEM_Microfabrication group_SU-8 ESI array with coin

    SU-8 ESI array with coin

    CHEM_Microfabrication group_Wafer with SU-8 separation chips

    Wafer with SU-8 separation chips

    CHEM_Microfabrication group_Woodpile of PLA

    Woodpile of PLA

    CHEM_Microfabrication group_ZnO ALD coated AAAO

    ZnO ALD coated AAAO

    Micronova Cleanroom

    Our work at Micronova cleanroom

    We work on silicon, glass and polymer technologies, utilizing the Micronova cleanroom. Micronova is the largest research cleanroom in northern Europe with its 2600 m2 of class 10-class 1000 space, shared between VTT and Aalto University. Micronova is equipped with a wide range of processing tools for MEMS, CMOS, III-V and polymer technologies.

    Micronova cleanroom equipment

    Examples of our equipment:

    • optical lithography with backside alignment (Süss MA-6)
    • DRIE (Oxford 100 cryo and STS Bosch) and RIE (Oxford 80)
    • PECVD (Oxford 80)
    • ALD (Picosun R200 and Beneq TFS 500 thermal and Beneq TFS 500 plasma)
    • sputtering (various tools) and evaporation (various tools)
    • Centrotherm tube furnaces (thermal oxidation, LPCVD poly, LPCVD nitride)
    • AML bonder/nanoimprint

    For a complete list of equipment, see:

    Research group members:

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    Latest publications:

    Superhydrophilic/Superhydrophobic Droplet Microarrays of Low Surface Tension Biofluids for Nucleic Acid Detection

    Mohammad Awashra, Pinja Elomaa, Tuomas Ojalehto, Päivi Saavalainen, Ville Jokinen 2024 Advanced Materials Interfaces

    (poster) Bosch-etched nanojungle black silicon and its applications

    Lingju Meng, Moe Awashra, Xiaolong Liu, Seyed Mehran Mirmohammadi, Ville Jokinen, Sami Franssila 2024

    Colloidal quantum dot materials for next-generation near-infrared optoelectronics

    Lingju Meng, Qiwei Xu, Jiangwen Zhang, Xihua Wang 2023 Chemical Communications

    Superhydrophobic Copper-Composite Surfaces Exert Antibacterial Effects against Gram-Negative and -Positive Bacteria

    Seyed Mehran Mirmohammadi, Kirsi Savijoki, Sasha Hoshian, Pekka Varmanen, Jari Yli-Kauhaluoma, Ville Jokinen, Sami Franssila 2023 Advanced Materials Interfaces

    Microalgae Chlorella vulgaris and kraft lignin stabilized cellulosic wet foams for camouflage

    Nina Forsman, Tia Lohtander, Juha Jordan, Ngoc Huynh, Ari Seppälä, Päivi Laaksonen, Sami Franssila, Monika Österberg 2022 Soft Matter

    Lightweight lignocellulosic foams for thermal insulation

    Tia Lohtander, Reima Herrala, Päivi Laaksonen, Sami Franssila, Monika Österberg 2022 Cellulose

    Effect of the roughness of steel fibre surface on its wettability and the cement paste close to fibre surface

    Anna Antonova, Marika Eik, Ville Jokinen, Jari Puttonen 2021 Construction and Building Materials
    More information on our research in the Aalto research portal.
    Research portal
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