OtaNano - Otaniemi research infrastructure for micro- and nanotechnologies

OtaNano is a national open access research infrastructure for micro- and nanotechnology. It serves as a state-of-the-art working environment for internationally recognized research fields, such as quantum technology, nanoelectronics, micro- and nanophotonics, and new materials, and as a national platform to develop innovative enabling technologies and apply them to practical micro- and nano-systems. It provides centralized access to advanced nanofabrication, nanomicroscopy and low-noise measurement facilities in the Otaniemi Campus area.

OtaNano is utilized by scientists and high-tech companies working with micro- and nanotechnology applications. It is operated by Aalto University and VTT, and available for academic and commercial users internationally.


    The Otaniemi Research Infrastructure for Micro- and Nanotechnologies offers a wide variety of production processes and equipment for micro- and nanostructures.

    The RI facilities include cleanroom area with versatile facilities including state of the art nanolithography and processing equipment, laboratories with built-in cleanrooms for micropackaging and back-end processes, well-equipped and controlled labs for thin film, MOVPE and MBE processes, and a separate semi-clean room of 150 m2 area.

    The RI hosts high-resolution electron microscopy, scanning probe microscopy and X-ray scattering instruments for soft, hard and biomaterial sample imaging and characterization.

    For experiments of quantum engineering, nanoelectronics and nanomechanical systems, the RI host world-class facilities including nine dilution refrigerators for sub 1 K research, two nuclear demagnetization cryostats for sub mK research, 5 shielded rooms and 6 vibration isolation platforms.

    The facilities are located in two buildings on the Otaniemi Campus area: Micronova and Nano-talo.

    For further information: OtaNano

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