Maria Golovleva
Visitor
Visitor
T411 Dept. Electronics and Nanoeng
Full researcher profile
https://research.aalto.fi/...
Research groups
- Hele Savin Group, Visitor (Faculty)
Publications
Non-disruptive HF pretreatment to enhance defect visibility in silicon wafer manufacturing via photoluminescence imaging
K. Sutinen, M. Golovleva, X. Liu, M. Patana, I. Timperi, Katja Mustonen, V. Vähänissi, H. Savin
2026
Semiconductor Science and Technology
(poster) Detection of nuclei for oxidation induced stacking faults
Kaisla Sutinen, Maria Golovleva, Jenni Salminen, Hele Savin
2026