Kristina Bespalova
Project Specialist
Project Specialist
T410 Dept. Electrical Engineering and Automation
Full researcher profile
https://research.aalto.fi/...
Sähköposti
[email protected]
Puhelinnumero
+358504127838
Osaamisalueet
piezoelectric, MEMS, Thin film technology, Thin films, aluminum nitride, AlN
Palkinnot
JVST A Best ALD Paper Award
Award for paper "Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls, by Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen and Mervi Paulasto-Kröckel, JVST A 39, 032403 (2021)"
Award or honor granted for a specific work
Department of Chemistry and Materials Science
Jun 2021
Tutkimusryhmät
- Electronics Integration and Reliability, Project Employee
Julkaisut
Development of piezoelectric microelectromechanical systems for multiaxial motion and sensing
Kristina Bespalova
2024
Metalorganic Chemical Vapor Deposition of AlN on High Degree Roughness Vertical Surfaces for MEMS Fabrication
Kristina Bespalova, Glenn Ross, Sami Suihkonen, Mervi Paulasto-Kröckel
2024
Advanced Electronic Materials
In-Plane AlN-based Actuator: Toward a New Generation of Piezoelectric MEMS
Kristina Bespalova, Tarmo Nieminen, Artem Gabrelian, Glenn Ross, Mervi Paulasto-Kröckel
2023
Advanced Electronic Materials
Unlocking the Potential of Piezoelectric Films Grown on Vertical Surfaces for Inertial MEMS
Gabrelian Gabrelian, Glenn Ross, Kristina Bespalova, Mervi Paulasto-Kröckel
2022
Materials Today Communications
Effect of crystal structure on the Young's modulus of GaP nanowires
Prokhor A. Alekseev, Bogdan R. Borodin, Pavel Geydt, Vladislav Khayrudinov, Kristina Bespalova, Demid A. Kirilenko, Rodion R. Reznik, Alexey Nashchekin, Tuomas Haggren, Erkki Lahderanta, George E. Cirlin, Harri Lipsanen, Mikhail S. Dunaevskiy
2021
Nanotechnology
Characterization of AlScN-Based Multilayer Systems for Piezoelectric Micromachined Ultrasound Transducer (pMUT) Fabrication
Kristina Bespalova, Elmeri österlund, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Thanniyil Sebastian, Cyril Baby Karuthedath, Stefan Mertin, Tuomas Pensala
2021
Journal of Microelectromechanical Systems
Atomic layer deposition of AlN using atomic layer annealing - Towards high-quality AlN on vertical sidewalls
Elmeri Österlund, Heli Seppänen, Kristina Bespalova, Ville Miikkulainen, Mervi Paulasto-Kröckel
2021
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration
Kristina Bespalova, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Sebastian Thanniyil, Cyril Karuthedath, Stefan Mertin, Tuomas Pensala
2020
Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020