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Micro- and Nanotechnology (minor)
Basic information
Code:
ELEC3082
Extent:
25
ECTS
Curriculum:
2026–2028
2024–2026
Level:
Advanced studies
Language of learning:
English
Target group:
All Aalto students
Teacher in charge:
Markku Sopanen
Sami Franssila
Administrative contact:
Jenni Tulensalo
Organising department:
Department of Electronics and Nanoengineering
Organiser:
School of Electrical Engineering
Prerequisites:
Basic university physics
Quotas and restrictions:
-
Application process:
-
Content and structure of the minor
About the minor
Micro- and nanotechnologies are the fundamental technologies for manufacturing electronic semiconductor devices, like integrated circuits, LED's and solar cells, for our modern society. These technologies find all the time more applications, e.g., including mechanical (MEMS) and chemical (lab-on-chip) functions. In this minor you learn how modern high technology operates and how the components are made. The curriculum can be personalized according to the student's particular field of interest and can be combined with various disciplines in different schools of Aalto University.
This minor gives you an excellent background especially to operate within the semiconductor industry.
After successful completion of the minor, the student
- can apply principles of physics and mathematical models for analysis of some semiconductor devices and photonics systems.
- can design and characterize at least some device types in micro- and nanotechnology.
- can explain fabrication methods and processes to realize some micro- and nanodevices.
Name of the minor in Finnish: Mikro- ja nanoteknologia (sivuaine)
Name of the minor in Swedish: Micro- och nanoteknologi (biämne)
| Code | Course name | ECTS | Teaching |
|---|---|---|---|
| CHEM-E5115 | Microfabrication | 5 | IV-V English |
Choose 20 ECTS from the list below |
|||
| CHEM-E4105 | Nanochemistry and Nanoengineering | 5 | I English |
| CHEM-E4215 | Functional Inorganic Materials | 5 | I English |
| CHEM-E5175 | Materials Engineering by Thin Films | 5 | III English |
| CHEM-E5140 | Materials Characterization, laboratory course | 5 | I-II English |
| CHEM-E5170 | Surfaces and Films | 5 | I-II English |
| CHEM-E8135 | Microfluidics and BioMEMS | 5 | III-IV English |
| ELEC-E3140 | Semiconductor Physics | 5 | I-II English |
| ELEC-E3210 | Optoelectronics | 5 | V English |
| ELEC-E3220 | Semiconductor Devices | 5 | III English |
| ELEC-E3240 | Photonics | 5 | III English |
| ELEC-E3280 | Micronova Laboratory Course | 5 | I-II English |
| ELEC-E8716 | Heterogeneous Integration | 5 | I-II English |
| ELEC-E9210 | Organic Electronics: Materials and Devices | 5 | I English |
| PHYS-E0525 | Microscopy of Nanomaterials | 5 | III-IV English |
| PHYS-E0526 | Microscopy of Nanomaterials, laboratory course | 5 | IV-V English |
Previous Curricula
Basic information
Code: ELEC3082
Extent: 25 ECTS
Curriculum: 2024–2026
Level: Advanced studies
Language of learning: English
Theme: Materials and sustainable use of natural resources
Target group: All Aalto students
Teacher in charge: Markku Sopanen Sami Franssila
Administrative contact: Jenni Tulensalo
Organising department: Department of Electronics and Nanoengineering
School: School of Electrical Engineering
Prerequisites: Basic university physics
Quotas and restrictions: -
Application process: -
About the minor
Micro- and nanotechnologies are the fundamental technologies for manufacturing electronic semiconductor devices, like integrated circuits, LED's and solar cells, for our modern society. These technologies find all the time more applications, e.g., including mechanical (MEMS) and chemical (lab-on-chip) functions. In this minor you learn how modern high technology operates and how the components are made. The curriculum can be personalized according to the student's particular field of interest and can be combined with various disciplines in different schools of Aalto University.
This minor gives you an excellent background especially to operate within the semiconductor industry.
Intended learning outcomes
After successful completion of the minor, the student
- can apply principles of physics and mathematical models for analysis of some semiconductor devices and photonics systems.
- can design and characterize at least some device types in micro- and nanotechnology.
- can explain fabrication methods and processes to realize some micro- and nanodevice
Content
| Code | Course name | ECTS | Period |
|---|---|---|---|
| CHEM-E5115 | Microfabrication | 5 | IV-V |
Choose 20 ECTS from the list below |
|||
| CHEM-E4105 | Nanochemistry and Nanoengineering | 5 | IV |
| CHEM-E4215 | Functional Inorganic Materials | 5 | I |
| CHEM-E5175 | Materials Engineering by Thin Films | 5 | III |
| CHEM-E5140 | Materials Characterization, laboratory course | 5 | I-II |
| CHEM-E5170 | Surfaces and Films | 5 | I-II |
| CHEM-E8135 | Microfluidics and BioMEMS | 5 | III-IV |
| ELEC-E3140 | Semiconductor Physics | 5 | I-II |
| ELEC-E3210 | Optoelectronics | 5 | V |
| ELEC-E3220 | Semiconductor Devices | 5 | III |
| ELEC-E3240 | Photonics | 5 | III |
| ELEC-E3280 | Micronova Laboratory Course | 5 | I-II |
| ELEC-E8716 | Heterogeneous Integration | 5 | I-II |
| ELEC-E8715 | Design and Analysis of MEMS | 5 | I-II |
| ELEC-E9210 | Organic Electronics: Materials and Devices | 5 | I |
| PHYS-E0525 | Microscopy of Nanomaterials | 5 | III-IV |
| PHYS-E0526 | Microscopy of Nanomaterials, laboratory course | 5 | IV-V |