Defence of doctoral thesis in the field of Photonics and Nanotechnology, M.Sc. Antti Peltonen
M.Sc. Antti Peltonen will defend the thesis "Characterization, surface treatment and device fabrication by charged particle beams" on 15 October 2021 at 13:15 in Aalto University School of Electrical Engineering, Department of Electronics and Nanoengineering.
Opponent: Prof. Nonappa, Tampere University, Finland
Custos: Prof. Ilkka Tittonen, Aalto University School of Electrical Engineering, Department of Electronics and Nanoengineering
Thesis available for public display at: https://aaltodoc.aalto.fi/doc_public/eonly/riiputus/
Doctoral theses in the School of Electrical Engineering: https://aaltodoc.aalto.fi/handle/123456789/53
In this dissertation charged particle beams are the main utilized methods in realizing new characterization, surface treatment and microfabrication methods. In the main focus are focused ion beam, electron microscopy and electron tomography methods. The developed methods have been utilized in novel sensor applications, in rapid nanofabrication of silicon structures and to improve contrast and resolution of Nafion film characterization by electron beam tomography. The results are being utilized in Nafion based electrochemical sensors, growth of nanowires, corrosion protection of high speed steel, increasing electrical conductance of carbon nanotube fiber bundles and micron size device platforms.
Contact information of doctoral candidate: