Marek Patočka
Doctoral Researcher
Doctoral Researcher
T410 Dept. Electrical Engineering and Automation
Full researcher profile
https://research.aalto.fi/...
E-post
marek.patocka@aalto.fi
Forskningsgrupp
- Electronics Integration and Reliability, Doctoral Researcher
Publikationer
A comparative study of non-destructive techniques for estimating dislocation densities in heteroepitaxial AlN layers
Marek Patočka, Nikhilendu Tiwary, Sami Suihkonen, Mervi Paulasto-Kröckel
2026
Journal of Applied Physics