Sami Franssila

Sami Franssila

Professori
T105 Chemistry and Materials
Professori
Full researcher profile
https://research.aalto.fi/...
Sähköposti
[email protected]
Puhelinnumero
+358505361699

Osaamisalueet

Thin film technology, Microfluidics, MEMS, Nanotechnology, Microfabrication

Tutkimusryhmät

  • Microfabrication, Professor

Julkaisut

Superhydrophobic Copper-Composite Surfaces Exert Antibacterial Effects against Gram-Negative and -Positive Bacteria

Seyed Mehran Mirmohammadi, Kirsi Savijoki, Sasha Hoshian, Pekka Varmanen, Jari Yli-Kauhaluoma, Ville Jokinen, Sami Franssila 2023 Advanced Materials Interfaces

Microalgae Chlorella vulgaris and kraft lignin stabilized cellulosic wet foams for camouflage

Nina Forsman, Tia Lohtander, Juha Jordan, Ngoc Huynh, Ari Seppälä, Päivi Laaksonen, Sami Franssila, Monika Österberg 2022 Soft Matter

Lightweight lignocellulosic foams for thermal insulation

Tia Lohtander, Reima Herrala, Päivi Laaksonen, Sami Franssila, Monika Österberg 2022 Cellulose

Fabrication of elastic, conductive, wear-resistant superhydrophobic composite material

Seyed Mehran Mirmohammadi, Sasha Hoshian, Ville P. Jokinen, Sami Franssila 2021 Scientific Reports

Slippery and magnetically responsive micropillared surfaces for manipulation of droplets and beads

Anas Al-Azawi, Christoph Horenz, Topi Tupasela, Olli Ikkala, Ville Jokinen, Sami Franssila, Robin H. A. Ras 2020 AIP Advances

Tunable and Magnetic Thiol-ene Micropillar Arrays

Anas Al-Azawi, Zoran Cenev, Topi Tupasela, Bo Peng, Olli Ikkala, Quan Zhou, Ville Jokinen, Sami Franssila, Robin Ras 2020 Macromolecular Rapid Communications

A microfluidic chip architecture enabling a hypoxic microenvironment and nitric oxide delivery in cell culture

Samineh Barmaki, Daniela Obermaier, Esko Kankuri, Jyrki Vuola, Sami Franssila, Ville Jokinen 2020 Micromachines

Fabrication and design rules of three dimensional pyrolytic carbon suspended microstructures

Joonas J. Heikkinen, Janez Košir, Ville Jokinen, Sami Franssila 2020 Journal of Micromechanics and Microengineering

Superhydrophobic Antireflection Coating on Glass Using Grass-like Alumina and Fluoropolymer

Kirill Isakov, Christoffer Kauppinen, Sami Franssila, Harri Lipsanen 2020 ACS applied materials & interfaces

Novel carbon film induces precocious calcium oscillation to promote neuronal cell maturation

Anastasia Ludwig, Sebnem Kesaf, Joonas J. Heikkinen, Tatiana Sukhanova, Shokoufeh Khakipoor, Florence Molinari, Christophe Pellegrino, Sung I. Kim, Jeon G. Han, Henri J. Huttunen, Sari E. Lauri, Sami Franssila, Ville Jokinen, Claudio Rivera 2020 Scientific Reports

Scalable Superomniphobic Surfaces

Ville Rontu, Ville Jokinen, Sami Franssila 2020 Journal of Microelectromechanical Systems

Fabrication of micro- and nanopillars from pyrolytic carbon and tetrahedral amorphous carbon

Joonas J. Heikkinen, Emilia Peltola, Niklas Wester, Jari Koskinen, Tomi Laurila, Sami Franssila, Ville Jokinen 2019 Micromachines

Disposable Microfluidic Sensor Based on Nanocellulose for Glucose Detection

Khan Mohammad Ahsan Uddin, Ville Jokinen, Farzin Ahangiri, Sarni Franssila, Orlando J. Rojas, Sampo Tuukkanen 2019 Global Challenges - An Innovative Journal for Tackling Humanity's Global Challenges

Practical realization of a sub-λ/2 acoustic jet

Daniel Veira Canle, Tuukka Kekkonen, Joni Mäkinen, Tuomas Puranen, Heikki J. Nieminen, Antti Kuronen, Sami Franssila, Tapio Kotiaho, Ari Salmi, Edward Hæggström 2019 Scientific Reports

A microfluidic oxygen sink to create a targeted cellular hypoxic microenvironment under ambient atmospheric conditions

Samineh Barmaki, Ville Jokinen, Daniela Obermaier, Daria Blokhina, Matti Korhonen, Robin H.A. Ras, Jyrki Vuola, Sami Franssila, Esko Kankuri 2018 Acta Biomaterialia

Platinum Recovery from Industrial Process Solutions by Electrodeposition-Redox Replacement

Petteri Halli, Joonas J. Heikkinen, Heini Elomaa, Benjamin P. Wilson, Ville Jokinen, Kirsi Yliniemi, Sami Franssila, Mari Lundström 2018 ACS Sustainable Chemistry and Engineering

Plasma etched carbon microelectrode arrays for bioelectrical measurements

Joonas J. Heikkinen, Tiina Kaarela, Anastasia Ludwig, Tatiana Sukhanova, Shokoufeh Khakipoor, Sung Il Kim, Jeon Geon Han, Henri J. Huttunen, Claudio Rivera, Sari E. Lauri, Tomi Taira, Ville Jokinen, Sami Franssila 2018 Diamond and Related Materials

Superhydrophobic blood-repellent surfaces

Ville Jokinen, Esko Kankuri, Sasha Hoshian, Sami Franssila, Robin Ras 2018 Advanced Materials

Controlled communication between physically separated bacterial populations in a microfluidic device

Ekaterina Osmekhina, Christopher Jonkergouw, Georg Schmidt, Farzin Jahangiri, Ville Jokinen, Sami Franssila, Markus Linder 2018 Communications Biology

Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma

Ville Rontu, Perttu Sippola, Mikael Broas, Glenn Ross, Harri Lipsanen, Mervi Paulasto-Kröckel, Sami Franssila 2018 JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A

Elastic and fracture properties of free-standing amorphous ALD Al2O3 thin films measured with bulge test

Ville Rontu, Anton Nolvi, Ari Hokkanen, Edward Haeggstrom, Ivan Kassamakov, Sami Franssila 2018 Materials Research Express

Sacrificial layer technique for releasing metallized multilayer SU-8 devices

Anand Tatikonda, Ville P. Jokinen, Hanno Evard, Sami Franssila 2018 Micromachines

Friction and Wetting Transitions of Magnetic Droplets on Micropillared Superhydrophobic Surfaces

Anas Al-Azawi, Mika Latikka, Ville Jokinen, Sami Franssila, Robin H.A. Ras 2017 Small

Etching Techniques for Superhydrophobic Surface Fabrication

Sami Franssila 2017 Non-wettable Surfaces: Theory, Preparation, and Applications

Water and Blood Repellent Flexible Tubes

Sasha Hoshian, Esko Kankuri, Robin H.A. Ras, Sami Franssila, Ville Jokinen 2017 Scientific Reports

Thiol-ene micropillar array electrospray ionization platform for zeptomole level bioanalysis

Katriina Lipponen, Sari Tähkä, T. Sikanen, V. Jokinen, A. Tatikonda, S. Franssila, R. Kostiainen, T. Kotiaho 2017 Analyst

SU-8 Based Pyrolytic Carbon for the Electrochemical Detection of Dopamine

Emilia Peltola, Joonas J. Heikkinen, Katariina Sovanto, Sami Sainio, Anja Aarva, Sami Franssila, Ville Jokinen, Tomi Laurila 2017 JOURNAL OF MATERIALS CHEMISTRY. B

Electrochemical Characterization of the Microfabricated Electrochemical Sensor-Array System

Kätlin Pitman, Merlin Raud, Gianmario Scotti, Ville Jokinen, Sami Franssila, Jaak Nerut, Enn Lust, Timo Kikas 2017 Electroanalysis

Electrooxidation of hexacyanoferrate(II) anions and electroreduction of oxygen in the microfabricated electrochemical sensor-array system

K. Pitman, J. Nerut, E. Lust, S. Franssila, M. Raud, T. Kikas 2017 Selected Proceedings from the 231st ECS Meeting New Orleans, LA - Spring 2017

Efficient Catalytic Microreactors with Atomic-Layer-Deposited Platinum Nanoparticles on Oxide Support

Ville Rontu, Anne Selent, Vladimir V. Zhivonitko, Gianmario Scotti, Igor V. Koptyug, Ville-Veikko Telkki, Sami Franssila 2017 CHEMISTRY: A EUROPEAN JOURNAL

Mechanical properties of ultrathin ALD Al2O3 films

Ville Rontu, Ari Hokkanen, Sami Franssila 2017

Hardness, elastic modulus, and wear resistance of hafnium oxide-based films grown by atomic layer deposition

Maria Berdova, Xuwen Liu, Claudia Wiemer, Alessio Lamperti, Grazia Tallarida, Elena Cianci, Marco Fanciulli, Sami Franssila 2016 JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A

Protective coatings of hafnium dioxide by atomic layer deposition for microelectromechanical systems applications

Maria Berdova, Claudia Wiemer, Alessio Lamperti, Grazia Tallarida, Elena Cianci, Luca Lamagna, Stefano Losa, Silvia Rossini, Roberto Somaschini, Salvatore Gioveni, Marco Fanciulli, Sami Franssila 2016 Applied Surface Science

Inkjet printed silver electrodes on macroporous paper for a paper-based isoelectric focusing device

Cristina Henriques Gaspar, Tiina Sikanen, Sami Franssila, Ville Jokinen 2016 Biomicrofluidics

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

Sasha Hoshian, Cristina Henriques Gaspar, Teemu Vasara, Farzin Jahangiri, Ville Jokinen, Sami Franssila 2016 Micromachines

Novel nanostructure replication process for robust superhydrophobic surfaces

Sasha Hoshian, Ville Jokinen, Sami Franssila 2016 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Robust hybrid elastomer/metal-oxide superhydrophobic surfaces

Sasha Hoshian, Ville Jokinen, Sami Franssila 2016 Soft Matter

UV-ozone patterning of micro-nano fibrillated cellulose (MNFC) with alkylsilane self-assembled monolayers

Tero Kämäräinen, Lokanathan R. Arcot, Leena-Sisko Johansson, Joseph Campbell, Tekla Tammelin, Sami Franssila, Janne Laine, Orlando J. Rojas 2016 Cellulose

Cellulose Nanofibril Film as a Piezoelectric Sensor Material

Satu Rajala, Tuomo Siponkoski, Essi Sarlin, Marja Mettänen, Maija Vuoriluoto, Arno Pammo, Jari Juuti, Orlando J. Rojas, Sami Franssila, Sampo Tuukkanen 2016 ACS Applied Materials and Interfaces

Fabrication of superomniphobic nanoserif surfaces

Ville Rontu, Sasha Hoshian, Syed Shah, Ville Jokinen, Sami Franssila 2016

Axonal Kainate Receptors Modulate the Strength of Efferent Connectivity by Regulating Presynaptic Differentiation

Prasanna Sakha, Aino Vesikansa, Ester Orav, Joonas Heikkinen, Tiina-Kaisa Kukko-Lukjanov, Alexandra Shintyapina, Sami Franssila, Ville Jokinen, Henri J. Huttunen, Sari E. Lauri 2016 FRONTIERS IN CELLULAR NEUROSCIENCE

Fracture properties of atomic layer deposited aluminum oxide free-standing membranes

Maria Berdova, Oili M. E. Ylivaara, Ville Rontu, Pekka T. Törmä, Riikka Puurunen, Sami Franssila 2015 JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A

MEMS lithography

Sami Franssila, Santeri Tuomikoski 2015 Handbook of silicon based MEMS materials and technologies, 2nd edition

Microfluidics and BioMEMS in silicon

Sami Franssila, Cristina Davis, Michael K. LeVasseur, Zhu Cao, Levent Yobas 2015 Handbook of silicon based MEMS materials and technologies, 2nd edition

Silicon Micropillar Electrospray Ionization Chip Platform for Biomolecular Analysis in the Aqueous Phase

Saara Hirvonen, Katriina Lipponen, Ville Jokinen, Sami Franssila, Risto Kostiainen, Tapio Kotiaho 2015 MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Amplified and Localized Photoswitching of TiO2 by Micro- and Nanostructuring

Sasha Hoshian, Ville Jokinen, Klas Hjort, Robin H. A. Ras, Sami Franssila 2015 ACS Applied Materials and Interfaces

Robust Superhydrophobic Silicon Without a Low Surface-Energy Hydrophobic Coating

Sasha Hoshian, Ville Jokinen, Villeseveri Somerkivi, Lokanathan Arcot Raghupathi, Sami Franssila 2015 ACS Applied Materials and Interfaces

Making porous conductive carbon films with unbalanced magnetron sputtering

Sung II Kim, Bibhuti Bhusan Sahu, Byung Mook Weon, Jeon Geon Han, Jari Koskinen, Sami Franssila 2015 Japanese Journal of Applied Physics

Deep Reactive Ion Etching

Franz Lärmer, Sami Franssila, Lauri Sainiemi, Kai Kolari 2015 Handbook of silicon based MEMS materials and technologies, 2nd edition

Microfluidics with on-line mass spectrometric methods for investigation of reaction mechanisms

Sofia M E Nilsson, Ingo Aumüller, Alexandros Kiriazis, Gustav Boije af Gennäs, Markus Haapala, Gianmario Scotti, Sami Franssila, Jari Yli-Kauhaluoma, Tapio Kotiaho 2015 MicroTAS 2015 - 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences

Interfacing microchip isoelectric focusing with on-chip electrospray ionization mass spectrometry

Nina Nordman, Susanna Lauren, Sami Franssila, Tapio Kotiaho, Risto Kostiainen, Tiina Sikanen 2015 JOURNAL OF CHROMATOGRAPHY A

Shape-Anchored Porous Polymer Monoliths for Integrated Online Solid-Phase Extraction-Microchip Electrophoresis-Electrospray Ionization Mass Spectrometry

Nina Nordman, Brianda Barrios-Lopez, Susanna Laurén, Pia Suvanto, Tapio Kotiaho, Sami Franssila, Risto Kostiainen, Tiina Sikanen 2015 Electrophoresis

Piezoelectric sensitivity measurement for nanofibrillated cellulose film sensors

Satu Rajala, Maija Vuoriluoto, Orlando Rojas, Sami Franssila, Sampo Tuukkanen 2015 IMEKO 2015 conference, XXI World Congress IMEKO, ISWFPC 2015. 18th International Symposium on Wood, Fiber and Pulping Chemistry, Tullin, September 07-08, 2015

Piezoelectric sensitivity measurements of cellulose nanofibril sensors

Satu Rajala, Maija Vuoriluoto, Orlando J. Rojas, Sami Franssila, Sampo Tuukkanen 2015 XXI IMEKO World Congress "Measurement in Research and Industry"

Growth of few-walled carbon nanotubes from platinum nanoparticle catalysts prepared by atomic layer deposition

Ville Rontu, Olli Pitkänen, Joonas Heikkinen, Yanling Ge, Krisztian Kordas, Sami Franssila, Sampo Tuukkanen 2015

Handbook of silicon based MEMS materials and technologies

Markku Tilli, Teruaki Motooka, Veli-Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos 2015

Handbook of Silicon Based MEMS Materials and Technologies

Markku Tilli, Teruaki Motooka, Veli Matti Airaksinen, Sami Franssila, Mervi Paulasto-Kröckel, Veikko Lindroos 2015

Blistering effect in ALD Al2O3 thin films grown with timethylaluminum and water

Maria Berdova, Ville Rontu, Timo Sajavaara, Antti-Pekka Eskelinen, Sami Franssila 2014

Corrigendum: Exceptionally strong and robust millimeterscale graphene-alumina composite (Nanotechnology (2014) 25, (355701))

Maria Berdova, Alexander Pyymaki Perros, Won Kim, Juha Riikonen, Tuomo Ylitalo, Jouni Heino, Changfeng Li, Ivan Kassamakov, Edward Hæggström, Harri Lipsanen, Sami Franssila 2014 Nanotechnology

Exceptionally strong and robust millimeter-scale graphenealumina composite membranes

Maria Berdova, Alexander Perros, Wonjae Kim, Juha Riikonen, Tuomo Ylitalo, Jouni Heino, Changfeng Li, Ivan Kassamakov, Edward Hæggström, Harri Lipsanen, Sami Franssila 2014 Nanotechnology

Mechanical assessment of suspended ALD thin films by bulge and shaft loading techniques

Maria Berdova, Tuomo Ylitalo, Ivan Kassamakov, Jouni Heino, Pekka Törmä, Lauri Kilpi, Helena Ronkainen, Jari Koskinen, Edward Hæggström, Sami Franssila 2014 Acta Materialia

Enhanced performance of a silicon microfabricated direct methanol fuel cell with PtRu catalysts supported on few-walled carbon nanotubes

Maryam Borghei, Gianmario Scotti, Petri Kanninen, Timo Weckman, Ilya V. Anoshkin, Albert G. Nasibulin, Sami Franssila, Esko I. Kauppinen, Tanja Kallio, Virginia Ruiz 2014 Energy

MME 2013 Editorial Preface

Sami Franssila, Kai Kolari 2014 Journal of Micromechanics and Microengineering

Micro-writing under water droplet using photo-switchable titanium oxide on nanocellulose coated micro-hoodoos

Sasha Hoshian, Ville Jokinen, Klas Hjort, Robin H A Ras, Sami Franssila 2014 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2014

Calibrating an optical scanner for quality assurance of large area radiation detectors

Aneliya Karadzhinova, Timo Hilden, Maria Berdova, Rauno Lauhakangas, Jouni Heino, Eija Tuominen, Sami Franssila, Edward Häggström, Ivan Kassamakov 2014 Measurement Science and Technology

Self-Propelling and Positioning of Droplets Using Continuous Topography Gradient Surface

Juan Li, X.L. Tian, A. P. Perros, Sami Franssila, Ville Jokinen 2014 Advanced Materials Interfaces

Characterization of nano-coated micro- and nanostructures by pushing

Ville Liimatainen, Janne Venäläinen, Mikko Koverola, Jussi Lyytinen, Ville Rontu, Maria Berdova, Jari Koskinen, Sami Franssila, Quan Zhou 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale,Taipei, Taiwan, October 27-31, 2014

Adhesion Testing of Atomic Layer Deposited TiO2 on Glass Substrate by the Use of Embedded SiO2 Microspheres

Jussi Lyytinen, Maria Berdova, Sami Franssila, Jari Koskinen 2014 JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A

Interfacial mechanical testing of atomic layer deposited TiO2 and Al2O3 on silicon substrate by the use of embedded SiO2 microspheres

Jussi Lyytinen, Maria Berdova, Petri Hirvonen, Xuwen Liu, Sami Franssila, Quan Zhou, Jari Koskinen 2014 RSC Advances

A micro heat exchanger microfabricated from bulk aluminium

G. Scotti, S. Franssila 2014 Journal of Physics: Conference Series

A micro heat exchanger microfabricated from bulk aluminium Journal of Physics

Gianmario Scotti, Sami Franssila 2014 PowerMEMS 2014, Awaji, Japan, October 10-21, 2014

Bulk-Aluminum Microfabrication for Micro Fuel Cells

Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila 2014 Journal of Microelectromechanical Systems

Laser Additive Manufacturing of Stainless Steel Micro Fuel Cells

Gianmario Scotti, Ville Matilainen, Petri Kanninen, Heidi Piili, Antti Salminen, Tanja Kallio, Sami Franssila 2014 Journal of Power Sources

Simple Stacking Methods for Silicon Micro Fuel Cells

Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila 2014 Micromachines

Laser Direct Writing of Thick Hybrid Polymers for Microfluidic Chips

Akanksha Singh, Gianmario Scotti, Tiina Sikanen, Ville Jokinen, Sami Franssila 2014 Micromachines

Lab-on-a-Chip Reactor Imaging with Unprecedented Chemical Resolution by Hadamard-Encoded Remote Detection NMR

Ville-Veikko Telkki, Vladimir V. Zhivonitko, Anne Selent, Gianmario Scotti, Jarmo Leppäniemi, Sami Franssila, Igor V. Koptyug 2014 Angewandte Chemie

Printable and disposable supercapacitor from nanocellulose and carbon nanotubes

S. Tuukkanen, S. Lehtimäki, F. Jahangir, A.-P. Eskelinen, D. Lupo, S. Franssila 2014 Proceedings of the 5th Electronics System-Integration Technology Conference, ESTC 2014

Characterization of thin film adhesion by MEMS shaft-loading blister testing

Maria Berdova, Jussi Lyytinen, Kestuti Grigoras, Anu Baby, Lauri Kilpi, Helena Ronkainen, Sami Franssila, Jari Koskinen 2013 JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A

Microtechnologies to fuel neurobiological research with nanometer precision

Cecilia A. Brunello, Ville Jokinen, Prasanna Sakha, Hideyuki Terazono, Fumimasa Nomura, Tomoyuki Kaneko, Sari E. Lauri, Sami Franssila, Claudio Rivera, Kenji Yasuda, Henri J. Huttunen 2013 JOURNAL OF NANOBIOTECHNOLOGY

Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

Kalle Hanhijarvi, Ivan Kassamakov, Juha Aaltonen, Ville Heikkinen, Lauri Sainiemi, Sami Franssila, Edward Haeggstrom 2013 IEEE-ASME TRANSACTIONS ON MECHATRONICS

A Microfluidic Chip for Axonal Isolation and Electrophysiological Measurements

Ville Jokinen, Prasanna Sakha, Pia Suvanto, Claudio Rivera, Sami Franssila, Sari E. Lauri, Henri J. Huttunen 2013 Journal of Neuroscience Methods

Durable superhydrophobicity in embossed CYTOP fluoropolymer micro and nanostructures

Ville Jokinen, Pia Suvanto, Anshul Rao Garapaty, Jussi Lyytinen, Jari Koskinen, Sami Franssila 2013 Colloids and Surfaces A: Physicochemical and Engineering Aspects

Microfluidics via controlled imbibition

Ville Jokinen, Sami Franssila 2013 Biomimetic, Bio-Inspired and Self-Assembled Materials for Engineered Surfaces and Applications

Cell adhesion and osteogenic differentiation on three-dimensional pillar surfaces

Emilia Kaivosoja, Pia Suvanto, Goncalo Barreto, Susanna Aura, Antti Soininen, Sami Franssila, Yrjo T. Konttinen 2013 JOURNAL OF BIOMEDICAL MATERIALS RESEARCH PART A

Nondestructive inspection of buried channels and cavities in silicon

Ivan Kassamakov, Kestutis Grigoras, Ville Heikkinen, Kalle Hanhijärvi, Juha Aaltonen, Sami Franssila, Edward Hæggström 2013 Journal of Microelectromechanical Systems

Picosecond laser ablation for silicon micro fuel cell fabrication

Gianmario Scotti, Daniel Trusheim, Petri Kanninen, Denys Naumenko, Malte Shulz-Ruhtenberg, Valentinas Snitka, Tanja Kallio, Sami Franssila 2013 Journal of Micromechanics and Microengineering

Laser direct writing of thick hybrid polymer microstructures

Akanksha Singh, Gianmario Scotti, Ville Jokinen, Sami Franssila 2013 2013 Transducers and Eurosensors XXVII

Microfabrication of low thermal mass heated nebulizer chips for mass spectrometry

M. Wirtssohn, Markus Haapala, Lauri Sainiemi, Sami Franssila 2013 Journal of Micromechanics and Microengineering

Remote detection NMR imaging of gas phase hydrogenation in microfluidic chips

Vladimir V. Zhivonitko, Ville-Veikko Telkki, Jarmo Leppaniemi, Gianmario Scotti, Sami Franssila, Igor V. Koptyug 2013 Lab on a chip

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

Kalle Hanhijärvi, I. Kassamakov, Ville Heikkinen, J. Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, E. Hæggström 2012 Optics Letters

Non-destructive 3D measurement of microchannels

Ville Heikkinen, A. Nolvi, I. Kassamakov, K. Grigoras, S. Franssila, E. Haeggstrom 2012 Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VI, San Diego, CA, 13 August 2012 - 14 August 2012

Nondestructive static and dynamic MEMS characterization using supercontinuum scanning white light interferometry

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, K. Grigoras, I. Kassamakov, S. Franssila, E. Haeggstrom 2012 Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, San Francisco, CA, 23 January 2012 - 24 January 2012

A practical guide for the fabrication of microfluidic devices using glass and silicon

Ciprian Iliescu, Hayden Taylor, Marioara Avram, Jianmin Miao, Sami Franssila 2012 Biomicrofluidics

Oxygen and nitrogen plasma hydrophilization and hydrophobic recovery of polymers

Ville Jokinen, Pia Suvanto, Sami Franssila 2012 Biomicrofluidics

Rotating multitip micropillar array electrospray ionization-mass spectrometry for rapid analysis and high-throughput screening

Teemu Nissila, Nina Backman, Marjo Kolmonen, Antti Leinonen, Alexandros Kiriazis, Jari Yli-Kauhaluoma, Lauri Sainiemi, Risto Kostiainen, Sami Franssila, Raimo A. Ketola 2012 INTERNATIONAL JOURNAL OF MASS SPECTROMETRY

IR-SWLI for subsurface imaging of large MEMS structures

A. Nolvi, V. Heikkinen, I. Kassamakov, J. Aaltonen, Tuomo Ylitalo, O. Saresoja, M. Berdova, S. Franssila, E. Haeggstrom 2012 Optical Micro- and Nanometrology IV, Brussels, 16 April 2012 - 18 April 2012

Use of methacrylate monolith inside of SU-8 microchip for on-line concentration of hydrophobic analytes before on-chip CZE-ESI/MS analysis

Nina Nordman, Brianda Barrios, Tiina Sikanen, Susanna Aura, Pia Suvanto, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2012 Abstracts of Papers of the American Chemical Society

A microfabricated micropillar liquid chromatographic chip monolithically integrated with electrospray ionization tip

Lauri Sainiemi, Teemu Nissilä, Raimo A. Ketola, Sami Franssila 2012 Lab on a chip

Integration of carbon felt gas diffusion layers in silicon micro fuel cells

Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila 2012 Journal of Micromechanics and Microengineering

Microchip capillary electrophoresis-electrospray ionization-mass spectrometry of intact proteins using uncoated Ormocomp microchips

Tiina Sikanen, Susanna Aura, Sami Franssila, Tapio Kotiaho, Risto Kostiainen 2012 Analytica Chimica Acta

Reversible Switching between Superhydrophobic States on a Hierarchically Structured Surface

Tuukka Verho, Juuso T. Korhonen, Lauri Sainiemi, Ville Jokinen, Chris Bower, Kristian Franze, Sami Franssila, Piers Andrew, Olli Ikkala, Robin H.A. Ras 2012 Proceedings of the National Academy of Sciences of the United States of America

Porous inorganic-organic hybrid material by oxygen plasma treatment

Susanna Aura, Ville Jokinen, Mikko Laitinen, Timo Sajavaara, Sami Franssila 2011 Journal of Micromechanics and Microengineering

Atomic Layer Deposition of Aluminum Oxide Films for Carbon Nanotube Network Transistor Passivation

Kestutis Grigoras, Marina Y. Zavodchikova, Albert G. Nasibulin, Esko I. Kauppinen, Vladimir Ermolov, Sami Franssila 2011 Journal of Nanoscience and Nanotechnology

SIMULTANEOUS TIRF MICROSCOPY AND OPTICAL TRAPPING FOR SINGLE MOLECULE EXPERIMENTS

Kalle Hanhijärvi, Heikki Ojala, Anders E. Wallin, Gabija Ziedaite, Susanna Aura, Sami Franssila, Dennis H. Bamford, Edward Hæggström 2011 Biophysical Society 55th Annual Meeting, Baltimore, Maryland, March 5-9, 2011

Hybrid Light Source for Scanning White Light Interferometry-based MEMS Quality Control

V. Heikkinen, K. Hanhijärvi, J. Aaltonen, H. Räikkönen, B. Wälchli, T. Paulin, I. Kassamakov, K. Grigoras, S. Franssila, E. Hæggström 2011 SPIE Optical Metrology, Proc. SPIE 8082, Munic, Germany,23 26 May 2011

Infrared Scanning White Light Interferometry Using a Solid State Light Source

V. Heikkinen, J. Aaltonen, B. Wälchli, H. Räikkönen, I Kassamakov, T. Cholakova, K. Grigorias, S. Franssila, R. Kakanakov, E. Hæggström 2011 SPIE Photonics West, Proc. SPIE 7928, San Francisco, California, USA, 22 27 January 2011

Engineered droplets for dried droplet solute deposition by mass spectrometric imaging

Ville Jokinen, Sami Franssila, Marc Baumann 2011 Microfluidics and Nanofluidics

MINIATURIZED LIQUID-LIQUID EXTRACTION SYSTEM BASED ON CONTROLLED AQUEOUS AND ORGANIC DROPLETS

V. Jokinen, T. Sikanen, R. Kostiainen, Sami Franssila 2011 Proc. MicroTAS 2011, Seattle, October 2-6, 2011

Feasibility of capillary liquid chromatography-microchip-atmospheric pressure photoionization-mass spectrometry for pesticide analysis in tomato

Anneli Kruve, Markus Haapala, Ville Saarela, Sami Franssila, Risto Kostiainen, Tapio Kotiaho, Raimo A. Ketola 2011 Analytica Chimica Acta

Superhydrophobic Tracks for Low-Friction, Guided Transport of Water Droplets

Henrikki Mertaniemi, Ville Jokinen, Lauri Sainiemi, Sami Franssila, Abraham Marmur, Olli Ikkala, Robin H.A. Ras 2011 Advanced Materials

Integrated microelectrode hot electron electrochemiluminescent sensor for microfluidic applications

Antti J. Niskanen, Tiina Ylinen-Hinkka, Sakari Kulmala, Sami Franssila 2011 Sensors and Actuators B: Chemical

Integrated photocatalytic micropillar nanoreactor electrospray ionization chip for mimicking phase I metabolic reactions

Teemu Nissila, Lauri Sainiemi, Mika-Matti Karikko, Marianna Kemell, Mikko Ritala, Sami Franssila, Risto Kostiainen, Raimo A. Ketola 2011 Lab on a chip

Rapid and sensitive drug metabolism studies by SU-8 microchip capillary electrophoresis-electrospray ionization mass spectrometry

Nina Nordman, Tiina Sikanen, Maria-Elisa Moilanen, Susanna Aura, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2011 JOURNAL OF CHROMATOGRAPHY A

RAPID BIOMOLECULE ANALYSIS USING TWO-DIMENSIONAL ELECTROPHORESIS-ELECTROSPRAY IONIZATION MICROCHIP

Nina Nordman, Tiina Sikanen, Susanna Aura, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2011 Proc. MicroTAS 2011, Seattle, October 2-6, 2011

INTEGRATED MULTI-TIP PHOTOCATALYTIC NANOREACTOR ELECTROSPRAY CHIP FOR PHOSPHOPEPTIDE ENRICHMENT AND OXIDATION

Miina Ruokolainen, Tiina Sikanen, Lauri Sainiemi, Teemu Nissilä, Raimo A. Ketola, Sami Franssila, Risto Kostiainen, Tapio Kotiaho 2011 Proc. MicroTAS 2011, Seattle, October 2-6, 2011

MICROFABRICATED ELECTROSPRAY IONIZATION PLATFORM WITH 60 TIPS FOR HIGH THROUGHPUT MASS SPECTROMETRIC ANALYSES

Lauri Sainiemi, Teemu Nissilä, Raimo A. Ketola, Sami Franssila, Risto Kostiainen 2011 Proc. Transducers 2011, Beijing, June 5-9, 2011

Microfabricated silicon platform with 60 microfluidic chips for rapid mass spectrometric analysis

Lauri Sainiemi, Teemu Nissilä, Risto Kostiainen, Raimo A. Ketola, Sami Franssila 2011 Lab on a chip

Non-Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication

Lauri Sainiemi, Ville Jokinen, Ali Shah, Maksim Shpak, Susanna Aura, Pia Suvanto, Sami Franssila 2011 Advanced Materials

Velcro-type attachment of black silicon and carbon cloth for improved galvanic contact in micro fuel cells

Gianmario Scotti, Maija Mäkinen, Petri Kanninen, Tanja Kallio, Sami Franssila 2011 Proc. PowerMEMS 2011, Seoul, Republic of Korea November 15-18, 2011

Refractive index of silicon with various doping levels at high temperatures

M. Shpak, Lauri Sainiemi, P. Kärhä, M. Heinonen, S. Franssila, E. Ikonen 2011 Newrad 2011, Maui, Hawaii, September 18.-23, 2011

INTACT PROTEIN SEPARATIONS WITH INHERENTLY BIOCOMPATIBLE ORMOCOMP SEPARATION CHIP WITH INTEGRATED ELECTROSPRAY IONIZATION EMITTER

Tiina Sikanen, Susanna Aura, Brianda Barrios-Lopez, Sami Franssila, Tapio Kotiaho, Risto Kostiainen 2011 Proc. MicroTAS 2011, Seattle, October 2-6, 2011

SUPERHYDROPHOBIC PERFLUOROPOLYMER MICRO- AND NANOSTRUCTURES BY EMBOSSING

P. Suvanto, V. Jokinen, Sami Franssila 2011 Proc. MicroTAS 2011, Seattle, October 2-6, 2011

Lithography-free fabrication of carbon nanotube network transistors

Marina Y. Timmermans, Kestutis Grigoras, Albert G. Nasibulin, Ville Hurskainen, Sami Franssila, Vladimir Ermolov, Esko I. Kauppinen 2011 Nanotechnology

Mechanically Durable Superhydrophobic Surfaces

Tuukka Verho, Chris Bower, Piers Andrew, Sami Franssila, Olli Ikkala, Robin H.A. Ras 2011 Advanced Materials

Determination of C-reactive protein by hot electron induced electrochemiluminescence on integrated electrode chips

Tiina Ylinen-Hinkka, Antti J. Niskanen, Sami Franssila, Sakari Kulmala 2011

Immunoassay of C-reactive protein by hot electron induced electrochemiluminescence using integrated electrodes with hydrophobic sample confinement

Tiina Ylinen-Hinkka, Antti J. Niskanen, Sami Franssila, Sakari Kulmala 2011 Analytica Chimica Acta

Feasibility of capillary liquid chromatography/microchip atmospheric pressure photoionization mass spectrometry in analyzing anabolic steroids in urine samples

Linda Ahonen, Markus Haapala, Ville Saarela, Sami Franssila, Tapio Kotiaho, Risto Kostiainen 2010 Rapid Communications in Mass Spectrometry

Combined photolithography and embossing for fabrication of multilevel, free standing microfluidic structures

Susanna Aura, Sami Franssila 2010 International Conference of Miniaturized systems for chemistry and life science

Feasability of SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microfluidic chips in the analysis of the human cell lysates

Nina Brenner, Tiina Sikanen, Susanna Aura, Santeri Tuomikoski, Katariina Vuorensola, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2010 Electrophoresis

Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

Nikolai Chekurov, Kestutis Grigoras, Lauri Sainiemi, Antti Peltonen, Ilkka Tittonen, Sami Franssila 2010 Journal of Micromechanics and Microengineering

Introduction to Microfabrication

Sami Franssila 2010

“MEMS lithography” in Handbook of silicon based MEMS materials and technologies

Sami Franssila, Santeri Tuomikoski, Veikko Lindroos, Markku Tilli, Ari Lehto, Teruaki Motooka 2010

Integrated liquid chromatography - heated nebulizer microchip for mass spectrometry

Markus Haapala, Ville Saarela, Jaroslav Pól, Kai Kolari, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2010 Analytica Chimica Acta

Feasibility of gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry in analysis of anabolic steroids

Laura Hintikka, Markus Haapala, Sami Franssila, Tiia Kuuranne, Antti Leinonen, Risto Kostiainen 2010 JOURNAL OF CHROMATOGRAPHY A

Analysis of selective androgen receptor modulators by gas chromatography-microchip atmospheric pressure photoionization-mass spectrometry

Laura Luosujärvi, Markus Haapala, Mario Thevis, Ville Saarela, Sami Franssila, Raimo A Ketola, Risto Kostiainen, Tapio Kotiaho 2010 Journal of the American Society for Mass Spectrometry

Environmental and food analysis by desorption atmospheric pressure photoionizationmass spectrometry

Laura Luosujärvi, Sanna Kanerva, Ville Saarela, Sami Franssila, Risto Kostiainen, Tapio Kotiaho, Tiina Kaupplia 2010 Rapid Communications in Mass Spectrometry

Bioresorbable Polymer Scaffolds by Micromolding in Capillaries

Minna Malin, Harri Korhonen, Ville Jokinen, Susanna Aura, M. Leinikka, Sami Franssila, Jukka Seppälä 2010

Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors

Antti J. Niskanen, Aapo Varpula, Mikko Utriainen, Gomathi Natarajan, David C Cameron, Sergey Novikov, Veli-Matti Airaksinen, Juha Sinkkonen, Sami Franssila 2010 Sensors and Actuators B: Chemical

Deposited dielectrics on metal thin films using silicon and glass substrates for hot electron-induced electrochemiluminescence

Antti J. Niskanen, Tiina Ylinen-Hinkka, Matti Pusa, Sakari Kulmala, Sami Franssila 2010 Thin Solid Films

Ionspray Microchip

Jaroslav Pól, Tiina J. Kauppila, Sami Franssila, Tapio Kotiaho, Risto Kostiainen 2010 Rapid Communications in Mass Spectrometry

Sähköä metanolipatruunasta

Anja Ranta, Tuula Noponen, Tom Granström, Gianmario Scotti, Petri Kanninen, Sami Franssila, Aarne Halme 2010 Prosessori

A micro fuel cell stack without interconnect overhead - macro world-like stacks in MEMS, 21st Micromechanics and Micro systems Europe Workshop

Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila 2010 Enschede, The Netherlands, 26.9.-29.9.2010

Characterization of Micro Fuel Cells with Black Silicon Gas Diffusion Layer, International Session on Nanomaterials: fabrication, characterisation and applications

Gianmario Scotti, Petri Kanninen, Maija Mäkinen, Tanja Kallio, Sami Franssila 2010 Palanga, Lithuania, 10.9.2010

Silicon nanograss as micro fuel cell gas diffusion layer

Gianmario Scotti, P. Kanninen, Mika Mäkinen, T. Kallio, S. Franssila 2010 MICRO AND NANO LETTERS

Optical Temperature Measurements of Silicon Microbridge Emitters

Maksim Shpak, Lauri Sainiemi, Maija Ojanen, Petri Kärhä, Martti Heinonen, Sami Franssila, Erkki Ikonen 2010 Applied Optics

Temperature measurements of a glowing microbridge

Maksim Shpak, Lauri Sainiemi, Maija Ojanen, Petri Kärhä, Martti Heinonen, Sami Franssila, Erkki Ikonen 2010 Applied Optics

Dynamic coating of SU-8 microfluidic chips with phospholipid disks

Tiina Sikanen, Susanne Wiedmer, Liisa Heikkilä, Sami Franssila, Risto Kostiainen, Tapio Kotiaho 2010 Electrophoresis

Hybrid Ceramic-Polymers New, Non-Biofouling and Optically Transparent Materials for Microfluidics

Tiina Sikanen, Susanna Aura, Liisa Heikkilä, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2010 Analytical Chemistry

Microchip technology in mass spectrometry

Tiina Sikanen, Sami Franssila, Tiina J. Kauppila, Risto Kostiainen, Tapio Kotiaho, Raimo A. Ketola 2010 MASS SPECTROMETRY REVIEWS

Fabrication of nanocluster silicon surface with electric discharge and the application in desorption/ionization on silicon-mass spectrometry (DIOS-MS)

Niina Suni, Markus Haapala, Elina Främ, Emma Härkönen, Mikko Ritala, Lauri Sainiemi, Sami Franssila, Tapio Kotiaho, Risto Kostiainen 2010 Lab on a chip

Pore formation in inorganic-organic hydrid material by oxygen plasma treatment

Susanna Aura, Ville Jokinen, Marc Baumann, Sami Franssila 2009

UV-enbossed inorganic-organic hybrid nanopillars for bioapplications

Susanna Aura, Ville Jokinen, Lauri Sainiemi, Marc Baumann, sami Franssila 2009 Journal of Nanoscience and Nanotechnology

SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips for high resolution quadrupole time-of-flight mass spectrometry

Nina Brenner, Tiina Sikanen, Susanna Aura, Santeri Tuomikoski, Katariina Vuorensola, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2009

Applications of focused ion beam in nanofabrications

Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen 2009 Fysiikan päivät 2009, Helsinki

Fabrication of SOI micro- and nanoelectromechanical devices by focused ion beam doping and deep reactive ion etching

Nikolai Chekurov, Lauri Sainiemi, Antti Peltonen, Ilkka Tittonen, Sami Franssila 2009

Localized gallium doping and cryogenic deep reactive ion etching in fabrication of silicon nanostructures

Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen 2009 MRS Spring Meeting 2009, April, San Francisco, USA

Silicon nanostructere fabrication by focused ion beam doping and cryogenic deep reactive ion etching

Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen 2009

The fabrication of silicon nanostructures by local gallium implantation and cryogenic deep reactive ion etching Ion Etching

Nikolai Chekurov, Kestutis Grigoras, Antti Peltonen, Sami Franssila, Ilkka Tittonen 2009 Nanotechnology

Atomic layer deposition on single-walled carbon nanotubes for device application

Kestutis Grigoras, M.Y Zavodchikova, A.G Nasibulin, E.I Kauppinen, V. Ermolov, S. Franssila 2009

Etching under the corner-inclined macropores by reactive ion etching

Kestutis Grigoras, Sami Franssila 2009 Physica Status Solidi A

Integrated liquid chomatography-heated nebulizer microchip for mass spectrometry

M. Haapala, S. Saarela, J. Pol, S. Franssila, T. Kotiaho, R. Kostiainen 2009

Microchip atmospheric pressure photoionization for analysis of pertoleum by FT-IVR mass spectrometry

Markus Haapala, Jeremiah M. Purcell, Ville Saarela, Sami Franssila, Ryan P. Rodgers, Christopher L. Hendrickson, Tapio Kotiaho, Alan Marshall, Risto Kostiainen 2009 Analytical Chemistry

Dynamic evaluation of lateral and vertical displacement of thermally actuated MEMS devices

K. Hanhijärvi, Juha Aaltonen, I. Kassamakov, K. Grigoras, L. Sainiemi, S. Franssila, E. Haeggström 2009

Microchip atmospheric pressure photoionization-mass spectrometry of underivatizeed anabolic steroids

Laura Hintikka, Markus Haapala, Tiia kuuranne, Antti Leinonen, Ville Saarela, Sami Franssila, Risto Kostiainen 2009

Silicon-glass instrumented solid-phase extraction-zone electrophoresis microchip with thin amorphous silicon filn electrodes: perfomance in immunoaffinity analysis

Ari Hokkanen, Heli Siren, Lotta Amundsen, Kai Kolari, Sami Franssila, Santeri Tuomikoski, Ingmar Stuns, Stella Rovio, Tarja Nevanen, Kristiina Takkinen, Hans Söderlund 2009 Microsystem Technologies

Microstructured surfaces for directional wetting

Ville Jokinen, Marianne Leinikka, Sami Franssila 2009 Advanced Materials

Surface assisted laser desorption/ionization on two-layered amorhous silicon coated hydrid nanostructures

Ville Jokinen, Susanna Aura, Laura Luosujärvi, Lauri Sainiemi, Tapani Kotiaho, Sami Franssila, Marc Baumann 2009 Journal of the American Society for Mass Spectrometry

Microchip heated nebulizer as an atmospheric pressure thermospray ionization source for mass spectrometry

P. Keski-Rahkonen, Markus Haapala, Ville Saarela, Risto Kostiainen, Tapio Kotiaho, Sami Franssila, S. Auriola 2009 RCM

New sampling surfaces for desorption atmospheric pressure photoionization-mass spectrometry

Laura Luosujärvi, Ville Vähänissi, Sami Franssila, Risto Kostiainen, Tapio Kotiaho, Tiina Kauppila 2009

Electronic cooling a submicron-sized metallic beam

Juha Muhonen, Antti Niskanen, Matthias Meschke, Yury Pashkin, J.S. Tsai, L. Sainiemi, S. Franssila, Jukka Pekola 2009 Applied Physics Letters

Electronic cooling of submicron-sized metallic beams

Juha Muhonen, Antti Niskanen, Matthias Meschke, Yu.A. Pashkin, J.S. Tsai, L. Sainiemi, S. Franssila, Jukka Pekola 2009 The XLIII Annual Conference of the Finnish Physical Society (Physics Days 2009), Espoo, Finland, 12-14 March

Ultrathin insulating films on silicon foe electrochemiluminescence

Antti Niskanen, Tiina Ylinen-Hinkka, Sakari Kulmala, Sami Franssila 2009 Thin Solid Films

Ultrathin tunnel insulator films on silicon for electrochemiluminescence studies

A.J. Niskanen, T. Ylinen-Hinkka, Sakari Kulmala, S. Franssila 2009 Thin Solid Films

Electrospray photoionization microchip for mass spectrometry

Teemu Nissilä, Lauri Sainiemi, Sami Franssila, Risto Kostiainen, Raimo Ketola 2009

Fully polymeric integrated microreactor/electrospray ionozation chip for on-chip digestion and mass spectrometric analysis

Teemu Nissilä, Lauri Sainiemi, Sami Franssila, Raimo Ketola 2009 Sensors and Actuators B: Chemical

Ti02-microchip combined to mass spectrometer for mimcking phase I metabolic reactions

Teemu Nissilä, Lauri Sainiemi, Mika-Matti Karikko, Marianna Kemell, Mikko Ritala, Sami Franssila, Risto Kostiainen, Raimo A. Ketola 2009

TiO2 microreactoe/electrospray ionization/MS for mimcking metabolic phase I reactions

T. Nissilä, L. Sainiemi, M-M. Karikko, M. Kemell, M. Ritala, S. Franssila, R. Kostiainen, R.A. Ketola 2009

Integrated chip for liquid chromatography separation and atmospheric pressure ionization for mass spectrometry

Ville Saarela, Markus Haapala, Jaroslav Pol, Kai Kolari, Risto Kostiainen, Sami Franssila 2009

Microflidic heated gas jet shape analysis by temperature scanning

Ville Saarela, Markus Haapala, Risto Kostiainen, Tapani Kotiaho, Sami Franssila 2009 Journal of Micromechanics and Microengineering

Fabrication of nanoperforated silicon membranes with tunalbe sized high aspect ratio perforations

Lauri Sainiemi, Jukka Viheriälä, Janne Laukkanen, Tapio Niemi, Sami Franssila 2009

Fabrication of thermal microbridge actuators and characterization of their electrical and mechanical responses

Lauri Sainiemi, Kestas Grigoras, Ivan Kassamakov, Kalle Hanhijärvi, Juha Aaltonen, Ji Fan, Ville Saarela, Edward Haeggström, Sami Franssila 2009 Sensors and Actuators A, Physical

Suspended nanostructured alumina membranes

Lauri Sainiemi, Kestas Grigoras, Sami Franssila 2009 Nanotechnology

Symmetric silicon micro fuel cell with porous eletrodes

Gianmario Scotti, Petri Kanninen, Tanja Kallio, Sami Franssila 2009 Transducers 2009, Denver, USA, June 21-25 2009

Application of polymer microfluidic chips to the characterization of recombinant human erytropoietin by electrospray ionization mass spectrometry

Tiina Sikanen, Susanna Aura, Sami Franssila, Tapio Kotiaho, Risto Kostiainen 2009 IMSC, Bremem 2009

Dynamic coating of SU-8 microchannels by phospholipid disks to study cell membrane associated interactions

Tiina Sikanen, Susanne Wiedmer, Liisa Heikkilä, Sami Franssila, Risto Kostiainen, Tapio Kotiaho 2009

Fully microfabricated polymer-based microfludic chips for bioanalysis

T. Sikanen, S. Franssila, S. Aura, S. Tuomikoski, T. Kotiaho, R. Kostiainen 2009 Pittcon 2009, Chicago, USA, March 8-13

Fabrication of nanoclustered silicon surface with electric discharge

N. Suni, M. Haapala, E. Färm, M. Ritala, L. Sainiemi, Sami Franssila, T. Kotiaho, R. Kostiainen 2009

Fabrication silicon nanoclusters with electric discharge

Niina Suni, Markus Haapala, Elina Färm, Mikko Ritala, Lauri Sainiemi, Sami Franssila, Tapio Kotiaho, Risto Kostiainen 2009

Optical tweezers experiments with a microfluidic laminar flow channel device

Anders Wallin, Heikki Ojala, Antti Rahikkala, Susanna Aura, Sami Franssila, Edward Haeggström, Roman Tuma 2009

Atomic layer deposition of thin aluminium oxide films for carbon nanotube based transitors

M.Y Zavodchikova, A.G Nasibulin, K. Grigoras, E.I Kauppinen, V. Ermolov, S. Franssila 2009

Carbon nanotube thin film transistors based on aerosol methods

Marina Zavodchikova, Tero Kulmala, Albert G. Nasibulin, Vladimir Ermolov, Sami Franssila, Kestutis Grigoras, Esko I. Kauppinen 2009 Nanotechnology

Rapid separation of protein digests on SU-8 based capillary electrophoresis-electrospray ionization mass spectrometry microchips

Nina Brenner, Tiina Sikanen, Susanna Aura, Santeri Tuomikoski, Katariina Vuorensola, Tapani Kotiaho, Sami Franssila, Risto Kostiainen 2008

Development and application of a miniaturised gel eletrophoresis device for protein analysis

Z. Demianova, E. Pöysä, S. Ihalainen, S. Aura, M. Shimmo, S. Franssila, Marc Baumann 2008 Molecular BioSystems

an entry in Encyclopedia of Micro-and nanofluidics

Sami Franssila, Lauri Sainiemi 2008 Encyclopedia of Micro-and nanofluidics

Materials and technologies foe analitical microsystems

Sami Franssila 2008 Helsinki Drug Research Conference, June 9-11, Helsinki

Coating of nanoporous membranes: atomic layer deposition versus sputtering

K. Grigoras, V-M Airaksinen, S. Franssila 2008 Nanotechnology

Etching undr the corner, inclined macropores by ICP-RIE

Kestutis Grigoras, Sami Franssila 2008

Investigation of sub-nm ALD aluminum oxide films by plasma assisted etch-through

K. Grigoras, S. Franssila, V-M. Airaksinen 2008 Thin Solid Films

Suppression of current hysteresis in Carbon Nanotube Network transistors by ALD passivation

Kestutis Grigoras, Tero Kulmala, Marina Zavodchikova, Albert Nasibulin, Esko Kauppinen, Vladimir Ermolov, Sami Franssila 2008

Effect of LED spectral shift on vertical resolution in stroboscopic white light interferometry

K. Hanhijärvi, Juha Aaltonen, I. Kassamakov, K. Grigoras, L. Sainiemi, Sami Franssila, E. Häggström 2008 Optical Sensors 2008

Capillary filling conditions of square-shaped microfluidic channels

Ville Jokinen, Sami Franssila 2008 Microfluidics and Nanofluidics

Complex droplets on chemically modified silicon nanograss

Ville Jokinen, Lauri Sainiemi, Sami Franssila 2008 Advanced Materials

Stroboscopic White Light Interferometry for Dynamic Characterization of Capacitive Pressure Sensors

I. Kassamakov, K. Hanhijärvi, Juha Aaltonen, L. Sainiemi, K. Grigoras, S. Franssila, E. Häggström 2008

Direct Analysis of Illicit Drugs by Desorption Atmospheric Pressure Photoionization

Tiina Kauppila, Ville Arvola, Markus Haapala, Jaroslav Pol, Laura Aalberg, Ville Saarela, Sami Franssila 2008 Rapid Communications in Mass Spectrometry

Microchip heated nebulizer as an atmospheric pressure thermospray ionozation source for mass spectrometry

P. Keski-Rahkonen, M Haapala, V. Saarela, S. Franssila, T. Kotiaho, R. Kostiainen, S. Auriola 2008

Deep plasma etching of glass for fluidic devices with different mask materials

K. Kolari, V. Saarela, S. Franssila 2008 Microengineering

Pattering of as-deposited, random SWNT network for FET channel application by optical lithography

T. Kulmala, K. Grigoras, M.Y Zavodchikova, A.G Nasibulin, E.I Kauppinen, V. Ermolov, S. Franssila 2008

Desorption and Ionization Mechanisms in Desorption Atmospheric Pressure Photoionization

L. Luosujärvi, V. Arvola, M. Haapala, J. Pol, V. Saarela, S. Franssila, T. Kotiaho, R. Kostiainen, TJ Kauppila 2008 Analytical Chemistry

Desorption atmospheric pressure photoionization-mass spectrometry in drug analysis

L. Luosujärvi, V Arvola, M Haapala, J. Pol, V. Saarela, S. Franssila, R. Kostiainen, T. Kotiaho, T. Kauppila 2008 Helsinki Drug Research Conference, June 9-11, helsinki

Gas chromatography-mass spectrometry of polychlorinated biphenyls using atmospheric pressure chemical ionization and atmospheric pressure photoionization microchip

Laura Luosujärvi, Mika-Matti Karikko, Markus Haapala, Ville Saarela, Sami Huhtala, Sami Franssila, Risto Kostiainen, Tapio Kotiaho, Tiina Kauppila 2008 Rapid Communications in Mass Spectrometry

Fabrication and electrical, mechanical and optical characterization of SOI thermal microbridge actuators

Lauri Sainiemi, Ivan Kassamakov, Kalle Hanhijärvi, Fan Ji, V. Saarela, Sami Franssila 2008 Sensors and Actuators

Fabrication and fluidic characterization of silicon micropillar array electrospray ionization chip

Lauri Sainiemi, Teemu Nissilä, Ville Jokinen, Tiina Sikanen, Tapio Kotiaho, Risto Kostiainen, Raimo A. Ketola, Sami Franssila 2008 Sensors and Actuators B: Chemical

Fabrication of freestending Al2o3 nanomembranes and bridges

L. Sainiemi, K. Grigoras, S. Franssila 2008

High-tempereture silicon microbridge actuator

Lauri Sainiemi, Kestutis Grigoras, Ji Fan, Ville Saarela, Ville Vähänissi, Aki Laakso, Sami Franssila 2008

Lidless SU-8 polymer electrospray ionization chip

L. Sainiemi, R. Ketola, S. Franssila 2008 MicroNanoEngineering 2008, Athens

Analytical characterization of microfabricated SU-8 emitters for electrospray ionization mass spectrometry

T. Sikanen, Santeri Tuomikoski, Raimo Ketola, R. Kostiainen, S. Franssila, T. Kotiaho 2008 Journal of Mass Spectrometry

Hybrid ceramic-polymer microfluidics chips for amino acid, peptide and protein CE separations

Tiina Sikanen, Susanna Aura, Liisa Heikkilä, Sami Franssila, Tapio Kotiaho, Risto Kostiainen 2008

Microchip-based CE-ESI/MS analysis of biological molecules

T. Sikanen, S. Tuomikoski, R.A Ketola, R. Kostianen, S. Franssila, T. Kotiaho 2008 Helsinki Drug Research Conference, June 9-11, helsinki

Temperature modeling and measurement of an electrokinetic separation chip

Tiina Sikanen, Thomas Zwinger, Santeri Tuomikoski, Sami Franssila, Reijo Lehtiniemi, Carl- Magnus Fager, Tapio Kotiaho, Antti Pursula 2008 Microfluidics and Nanofluidics

Selective Surface Patterning with an Electric Discharge in the Fabrication of Microfluidic Structures

Niina Suni, Markus Haapala, Ari Mäkinen, Lauri Sainiemi, Sami Franssila, Elina Färm, Esa Puukilainen, Mikko Ritala, Risto Kostiainen 2008 Angewandte Chemie

Selective surface patterning with electric discharge

N. Suni, M. Haapala, A. Mäkinen, L. Sainiemi, S. Franssila, E. Färm, E. Puukilainen, M. Ritala, Jari Yli-Kauhaluoma, R. Kostiainen 2008

Towards High-Throughput Optical Tweezers Experiments

A.E Wallin, H. Ojala, S. Aura, S. Franssila, E. Häggström, R. Tuma 2008

Detection of bacterial spores on the basis of electrochemiluminescence

Tiina Ylinen-Hinkka, Antti Niskanen, Sami Franssila, Sakari Kulmala, Timo Ala-Kleme 2008

Disposable Electrochemiluminescence Sensors of Bacterial Spores

Tiina Ylinen-Hinkka, Antti Niskanen, Sami Franssila, Timo Ala-Kleme, Sakari Kulmala 2008

Novel carbon nanotube network deposition technique for electronic device fabrication

Marina Zavodchikova, Albert Nasibulin, Tero Kulmala, Kestutis Grigoras, Amton S. Anisimov, Sami Franssila, Vladimir Ermolov, Esko Kauppinen 2008 Physica Status Solidi B

Novel carbon nanotube network deposition techniques for electronic device fabrication

M. Zavodchikova, T. Kulmala, K. Grigoras, A.G Nasibulin, A.S Anisimov, S. Franssila, V. Ermolov, E.I Kauppinen 2008

Thin film transistors based on carbon nanotubes prepared by aerosol technique

Marina Zavodchikova, K. Grigoras, T. Kulmala, A. Nasibulin, V. Ermolov, Sami Franssila 2008 Nanotechnology

Novel hybrid material for microfluidic devices

Susanna Aura, Tiina Sikanen, Tapio Kotiaho, Sami Franssila 2007 Sensors and Actuators B: Chemical

Novel hybrid material for microfluidic devices

Susanna Aura, Tiina Sikanen, Tapio Kotiaho, Sami Franssila 2007 Transducers 07; Solid-State Sensors, Actuators and Microsystems Conference, 2007. International. 10-14 June 2007

Mask material effects in cryogenic deep reactive ion etching

Sami Franssila, Lauri Sainiemi 2007 Journal of Vacuum Science and Technology. Part B.

Application of ultra-thin aluminum oxide etch mask made by atomic layer deposition technique

K. Grigoras, L. Sainiemi, J. Tiilikainen, A. Säynätjoki, V-M. Airaksinen, S. Franssila 2007 Journal of Physics: Conference Series

Coating of nanoporous membranes atomic layer deposition versus sputtering

K. Grigoras, Sari Sirviö, V-M Airaksinen, S. Franssila 2007 NanoSmat 2007, Algarve, Portugal 9-11 July

Desorption Atmospheric Pressure Photoionization

Markus Haapala, Jaroslav Pol, Ville Saarela, Ville Arvola, Tapio Kotiaho, Raimo Ketola, Sami Franssila, Tiina Kauppila, Risto Kostiainen 2007 Analytical Chemistry

Microchip APPI Device for Combining GC or LC with MS

Markus Haapala, Laura Luosujärvi, Ville Saarela, Tapio Kotiaho, Raimo A. Ketola, Sami Franssila, Risto Kostiainen 2007

Microchip for combining gas chromatography or capillary liquic chromatography with Atmospheric Pressure Photoionization Mass Spectrometry

M. Haapala, L. Luosujärvi, V. Saarela, T. Kotiaho, R. Ketola, S. Franssila, R. Kostiainen 2007 Analytical Chemistry

Microfaricated nebulizer chips for atmospheric pressure photoionization mass spectrometry

Markus Haapala, Jaroslav Pol, Tiina Kauppila, Laura Luosujärvi, Ville Saarela, Sami Franssila, Raimo Ketola, Tapio Kotiaho, Risto Kostiainen 2007

Desorption Atmospheric Pressure Photoionozation

Tiina Kauppila, Markus Haapala, Jaroslav Pol, Ville Arvola, Ville Saarela, Sami Franssila, Raimo Ketola, Risto Kostiainen 2007

Deep plasme etching of glass for fluidic devices

K. Kolari, V. Saarela, S. Franssila 2007

Fabrication of nanopillars for chemical analysis using deposited silica aerosol particles as etching mask

Jyrki M. Mäkelä, Helmi Keskinen, Mikko Aromaa, L. Sainiemi, Laura Luosujärvi, T. Kotiaho, S. Franssila 2007 European Aerosol Conference 2007, Salzburg

Miniature Tunnel Oxide Electrodes on Silicon for Aqueous Hot Electron Electrochemistry and Electrochemiluminescence Studies

Antti J. Niskanen, Tiina Ylinen-Hinkka, Markus Håkansson, Johanna Suomi, Timo Ala-Kleme, Sakari Kulmala, Sami Franssila 2007

Micropillar array electrospray chip for analysis of biomolecules

Teemu Nissilä, Lauri Sainiemi, Tiina Sikanen, Tapani Kotiaho, Sami Franssila, Risto Kostiainen, Raimo A. Ketola 2007

Silicon Micropillar Array Electrospray Chip for Drug and Biomolecule Analysis

T Nissilä, L. Sainiemi, T. Sikanen, T. Kotiaho, S. Franssila, R Kostiainen, R. Ketola 2007 Rapid Communications in Mass Spectrometry

Glass microfabricated nebulizer chip for mass spectrometry

V. Saarela, Markus Haapala, Risto Kostiainen, Tapio Kotiaho, Sami Franssila 2007 Lab on a Chip

On-chip liquid cromatography-atmospheric pressure ionization mass spectrometry

Ville Saarela, Markus Haapala, Jaroslav Pol, Nisse Kalkkinen, Marko Hukka, Kai Kolari, Raimo Ketola, Risto Kostiainen, Tapio Kotiaho, Sami Franssila 2007

High sensitivity micropillar electrospray ionization chip fabricated of silicon

Lauri Sainiemi, T. Nissilä, T. Sikanen, T. Kotiaho, R. Kostiainen, R. Ketola, S. Franssila 2007

Rapid fabrication of high aspect ratio silicon nanopillars for Chemical analysis

L. Sainiemi, Helmi Keskinen, Mikko Aromaa, Laura Luosujärvi, K. Grigoras, T. Kotiaho, Jyrki M. Mäkelä, S. Franssila 2007 Nanotechnology

Fully integrated, polymer-based CZE-ESI microchip for high throughput MS analysis

T. Sikanen, S. Tuomikoski, R.A Ketola, R. Kostiainen, S. Franssila, T. Kotiaho 2007

Fully microfabricated and integrated, SU-8-based capillary electrophoresis-electrospray ionization microchips for mass spectrometry

T. Sikanen, S. Tuomikoski, R. Ketola, R. Kostiainen, S. Franssila, T. Kotiaho 2007 Analytical Chemistry

Performance of SU-8 microchips as separation devices and comparison

T. Sikanen, Liisa Heikkilä, Santeri Tuomikoski, Raimo A. Ketola, Risto Kostiainen, S. Franssila, T Kotiaho 2007 Analytical Chemistry

Atomic layer deposition of Al2O3, TiO2 and ZnO films into high aspect ratio pores

Sari Sirviö, L. Sainiemi, S. Franssila, K. Grigoras 2007 Transducers 07, Lyon, France, 10-14.06.2007

Monolithically integrated electrophoresis microchip with electrospray ionization mass spectrometry detection

Santeri Tuomikoski, Tiina Sikanen, Raimo Ketola, Risto Kostiainen, Tapio Kotiaho, Sami Franssila 2007

Microfluidic channels from photoactive hybrid material ORMOCER[R]

Susanna Aura, Sami Franssila 2006 MICRO STRUCTURE WORKSHOP, Västerås, Ruotsi, 2006

A microfabricated nebulizer for liquid vaporization in chemical analysis

Sami Franssila, Seppo Marttila, Kai Kolari, Pekka Östman, Tapio Kotiaho, Risto Kostiainen, Reijo Lehtiniemi, Carl-Magnus Fager, Jorma Manninen 2006 Journal of Microelectromechanical Systems

Automated 2D analysis on a proteome microchip

Sami Franssila, Zuzana Demianova, Masahiko Shimmo, Eemeli Pöysä, Tapio Kotiaho, Risto Kostiainen, Marc Baumann 2006 MSB; International Symposium on Micro Scale Bioseparation, Amsterdam, Alankomaat, 22-26.1.2006

Development of analytical methods for analysis of drug and environmental compounds using gas chromatography-microchip APCI-MS

Sami Franssila, Laura Luosujärvi, Markus Haapala, Pekka Östman, Risto Kostiainen, Kestutis Grigoras, Raimo Ketola, Tapio Kotiaho 2006 IMSC 2006, Praha, Tsekki, elokuu 2006

Minimum Proton Affinity for Efficient Ionization with Atmospheric Pressure Desorption /Ionization on Silicon Mass Spectrometry

Sami Franssila, Pekka Östman, Jaana M.H. Pakarinen, Pirjo Vainiotalo, Risto Kostiainen, Tapio Kotiaho 2006 Rapid Communications in Mass Spectrometry

Application of ultra-thin aluminium oxide mask made by atomic layer deposition technique

kestutis Grigoras, Veli-Matti Airaksinen, Sami Franssila, Lauri Sainiemi, Jouni Tiilikainen, Antti Säynätjoki 2006 International Conference on Nanoscience and Technology, Basel, Sveitsi, 30.7-4.8.2006

Spontaneous microflow of micropillar array electrospray electrospray ionization microchip

T. Nissilä, L. Sainiemi, T. Sikanen, T. Kotiaho, S. Franssila, R. Kostiainen, R.A. Ketola 2006 Proc. MicroTAS (Proc. µTAS), 2006, Tokyo

Thermal characterization of a microfluidic nebulizer

Ville Saarela, Markus Haapala, Risto Kostiainen, Tapio Kotiaho, Sami Franssila 2006 MICRO STRUCTURE WORKSHOP, Västerås, Ruotsi, 2006

Mask material effects in cryogenic DRIE

Lauri Sainiemi, Sami Franssila 2006 MICRO STRUCTURE WORKSHOP, Västerås, Ruotsi, 2006

Design and fabrication of integrated solid-phase extraction-zone electrophoresis microchip

Santeri Tuomikoski, Nina Virkkala, Stella Rovio, Ari Hokkanen, Heli Sirén, Sami Franssila 2006 JOURNAL OF CHROMATOGRAPHY A

Capillary liquid chromatography-microchip atmospheric pressure chemical ionization-mass spectrometry

Pekka Östman, Sirkku Jäntti, Kestutis Grigoras, Ville Saarela, Raimo A. Ketola, Sami Franssila, Tapio Kotiaho, Risto Kostiainen 2006 Lab on a chip

Gas Chromatography-Microchip Atmospheric Pressure Chemical Ionization-Mass Spectrometry

Pekka Östman, Laura Luosujärvi, Markus Haapala, Kestutis Grigoras, Raimo Ketola, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2006 Analytical Chemistry

Developed of a microdevice for 2-dimensional gel electrophoresis

Zuzana Demianova, Masahiko Shimmo, Eemeli Pöysä, Tapani Kotiaho, Risto Kostiainen, Sami Franssila, Marc Bauman 2005 American Laboratory Autmation Conference, USA, 2005

Infrared thermal imaging of microfluidic chips

Sami Franssila, Kestutis Grigoras, Seppo Marttila, Reijo Lehtiniemi, Carl-Magnus Fager, Jorma Manninen 2005 MicroTAS 2005, Micro Total analysis Systems 2005, Boston, MA, USA, 9-13.10.2005

The effect of physical properties of selected molecules on desorption/ionization on porous silicon-mass spectrometry

Sami Franssila, Pekka Östman, Risto Kostiainen, Raimo Ketola, Tapio Kotiaho 2005 53rd ASMS Conference on Mass Spectrometry and Allied Topics, San Antonia, Texas, USA, 5-9.6.2005

Fabrication of porous membrane filter from p-type silicon

K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen 2005 Physica Status Solidi

Re-usable multi-inlet PDMS fluidic connector

Ville Saarela, Sami Franssila, Santeri Tuomikoski, Seppo Marttila, Pekka Östman, Tiina Sikanen, Tapio Kotiaho, Risto Kostiainen 2005 Sensors and Actuators B: Chemical

Characterization of SU-8 for electrokinetic microfluidic applications

Tiina Sikanen, Santeri Tuomikoski, Raimo Ketola, Risto Kostiainen, Sami Franssila, Tapio Kotiaho 2005 Lab on aChip

Characterization of SU-8 microchannels for electrophoretic separations

Tiina Sikanen, Iiro Korpisalo, Santeri Tuomikoski, Raimo Ketola, Risto Kostiainen, Tapio Kotiaho, Sami Franssila 2005

Characterization of SU-8 polymer for electrophoretic separaions

T. Sikanen, Iiro Korpisalo, S. Tuomikoski, R.A. Ketola, R. Kostiainen, Sami Franssila, T. Kotiaho 2005 Nanotech 2005, Montreux 14-17.11.2005

Design and fabrication of integrated SPE-CE device for testosterone detection

Santeri Tuomikoski, Stella Rovio, Ari Hokkanen, Heli Siren, Sami Franssila 2005

Fabrication and optimization of enclosed SU-8 tips for electrospray ionization mass spectrometry

Santeri Tuomikoski, Tiina Sikanen, Risto Kostiainen, Sami Franssila 2005 MicroTotalAnalysis Systems ´05, Boston 9-13.11.2005

Fabrication of enclosed SU-8 tips for electrospray ionization mass spectrometry

Santeri Tuomikoski, T. Sikanen, Raimo Ketola, R. Kostiainen, T. Kotiaho, Sami Franssila 2005 Electrophoresis

Fabrication on enclosed SU-8 tips for electrospray ionization spectrometry

Santeri Tuomikoski, tiina Sikanen, Raimo Ketola, Tapio Kotiaho, Sami Franssila 2005 Electrophoresis

Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

Santeri Tuomikoski, Sami Franssila 2005 Sensors and Actuators A

SPE/CE chip in SU-8

S. Tuomikoski, S. Franssila, H. Siren, S. Rovio, A. Hokkanen 2005

Electrophoretic separations of pharmaceutical compounds in microchannels composed of SU-8 polymer

T. Zwinger, T. Sikanen, S. Tuomikoski, R.A. Ketola, R. Kostiainen, S. Franssila, T. Kotiaho 2005 PharmaSci-Fair, Pharmaceutical Sciences Fair and Exhibition 12-17.6.2005, Nice, France

Introduction to Microfabrication

Sami Franssila 2004

Microfluidic Nebulizer Chip for Mass Spectrometry

S. Franssila, P. Östman, S. Marttila, T. Kotiaho, R. Kostiainen 2004 MicroStructure Workshop MSW '04, Ystad, Sweden March 29-31 2004

Mikrokanavia biosiruihin

Sami Franssila, Tapio Kotiaho, Risto Kostiainen, Marc Baumann, Matti Leppihalme, Ari Hokkanen, Kestutis Grigoras 2004 Prosessori

Pisaroita piikiekolla

Sami Franssila 2004 Helsingin Sanomat

Fabrication of porous membrane filter from p-type silicon

K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen 2004

Fabrication of porous membrane filter from p-type silicon

K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, R. Kostiainen 2004 Porous silicon science and technology 2004, Cullera-Valencia, Spain, 14-20.03.2004

Formation of nanoporous glass layer

Kestutis Grigoras, Sami Franssila 2004 Physica Scripta

Atmospheric Pressure Photoionization-Mass Spectrometry with a Microchip Heated Nebulizer

Tiina Kauppila, Pekka Östman, Seppo Marttila, Raimo Ketola, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2004 Analytical Chemistry

Atmospheric pressure photoionization with a microchip heated nebulizer

T. Kauppila, P. Östman, S. Marttila, R. Ketola, T. Kotiaho, S. Franssila, R. Kostiainen 2004 Proceedings MicroTAS

Atmospheric pressure photoionization with a microchip heated nebulizer

T. Kauppila, P. Östman, S. Marttila, R. Ketola, T. Kotiaho, S. Franssila, R. Kostiainen 2004

DLC-PDMS-hybrid patterning and surface treatment

T. Laakso, A. Soininen, S. Franssila 2004 Proceedings MicroTAS

DLC-PDMS-hybrid patterning and surface treatment

T. Laakso, A. Soininen, S. Franssila 2004

Reusable multi-inlet PDMS fluidic connector

Ville Saarela, Sami Franssila 2004

Fabrication of 3D SU-8 tips for electrospray ionization mass spectrometry

Santeri Tuomikoski, Tiina Sikanen, Risto Kostiainen, Tapio Kotiaho, Sami Franssila 2004

Fabrication of microfluidic devices from SU-8

Santeri Tuomikoski, Sami Franssila 2004 Micro structure workshop 2004, 30-31. Marc 2004, Ystad, Sweden

Wafer-level bonding of MEMS structures with SU-8 epoxy photoresist

S. Tuomikoski, S. Franssila 2004 Physica Scripta

Microchip atmospheric pressure chemical ionisation-mass spectrometry

Pekka Östman, Seppo Marttila, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2004 Proceedings MicroTAS

Microchip atmospheric pressure chemical ionisation-mass spectrometry

P. Östman, S. Marttila, S. Kotiaho, s. Franssila, R. Kostiainen 2004

Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectromerty

P. Östman, S.J. Marttila, T. Kotiaho, S. Franssila, R. Kostiainen 2004

Miniaturised Heated Nebuliser for Atmospheric Pressure Chemical Ionisation Mass Spectrometry

Pekka Östman, Seppo J. Marttila, Tapio Kotiaho, Sami Franssila, Risto Kostiainen 2004 Analytical Chemistry

Droplet based self-assembly of SU-8 microparts

S. Corral, Q. Zhou, A. Albut, S. Franssila, S. Tuomikoski, H. Koivo 2003

Droplet based self-assembly of SU-8 microparts

Carlos del Corral, Quan Zhou, Aurelian Albut, Bo Chang, Sami Franssila, Santeri Tuomikoski, Heikki N. Koivo 2003 2nd VDE World Microtechnologies Congress, Munich, Germany, October 13 15, 2003

Microfluidic-to-mass spectrometry interfacing with atmospheric pressure chemical ionization (APCI) microchip

S. Franssila, S. Marttila, P. Östman, T. Kotiaho, R. Kostiainen 2003

Formation of nanoporous glass layer

K. Grigoras, S. Franssila 2003

Feasibility of Atmospheric Pressure Desorption/Ionization on Silicon Mass Spectrometry in Analysis of Drugs

K. Huikko, P. Östman, C. Sauber, F. Mandel, K. Grigoras, S. Franssila, T. Kotiaho, R. Kostiainen 2003 Rapid Communications in Mass Spectrometry

Poly(Dimethylsiloxane) Electrospray Devices Fabricated With Diamond-Like Carbon-Poly(Dimethylsiloxane) Coated SU-8 Masters

K. Huikko, P. Östman, K. Grigoras, S. Tuomikoski, V-M. Tiainen, A. Soininen, A. Manz, S. Franssila, R. Kostiainen, T. Kotiaho 2003 Lab on a Chip

Rapid thermal annealing of Cu/WNx/Si structures

Antti Lipsanen, Pekka Kuivalainen, Eero Rauhala, Sami Franssila, Anu Seppälä 2003 Journal of Materials Science: Materials in Electronics

Luminescence study of silicon nanostructures prepared by ion beam mixing

V. Ovchinnikov, V. Sokolov, S. Franssila 2003 Microelectronics Journal

Thickness Evaluation of Si/SiO2 Multilayers by Ellipsometry and Reflection Spectrometry

V. Ovchinnikov, Sami Franssila, H. Jiang, A.G. Nasibulin, E.I. Kauppinen 2003

SU-8 as a mechanical material: gripper tips and microparts for a microassembly robot

S. Tuomikoski, C. del Corral, Q. Zhou, S. Franssila 2003

Microglow: a microsystems laboratory course

S. Franssila, I. Tittonen, K. Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä 2002 Micro Structure Workshop 2002, Aronsborg, Bålsta

Microsystems and nanotechnology in the Nordic region

S. Franssila, L. Furuberg, P. Enoksson, F. Grey, A. Larsen 2002 Proc. 8th Worl Micromachine Summit, Maastricht, 2002

Silicon devices for chemistry and lifesciences

Sami Franssila 2002 Suomen Kemian Seura, Kemian päivät 2002

PDMS electrospray devices fabricated by PDMS-diamond-coated SU-8 masters

K. Huikko, P. Östman, K. Grigoras, S. Tuomikoski, V.-M. Tiainen, A. Soininen, A. Manz, S. Franssila, R. Kostiainen, T. Kotiaho 2002

PDMS Electrospray Devices Fabricated by PDMS-Diamond-Coated SU-8 Masters

K. Huikko, P. Östman, K. Grigoras, S. Tuomikoski, V.-M. Tiainen, A. Soininen, K. Puolanne, A. Manz, S. Franssila, R. Kostiainen, T. Kotiaho 2002

Micromechanics in silicon

T. Juvonen, J. Poulsen, S. Franssila 2002 Micro Structure Workshop 2002, Aronsborg, Bålsta

Optical interferometric detection of a mechanical silicon oscillator

Kaisa Nera, Ossi Hahtela, Sami Franssila, Ilkka Tittonen 2002

Luminescence Study of Silicon Nanostructures Prepared by Ion Beam mixing

V. Ovchinnikov, V. Sokolov, Sami Franssila 2002

Electrochemiluminoimmunoassay of 2-microglobulin at disposable planar oxide-coated silicon electrodes

Anna-Maria Spehar, Piia Vainio, J. Eskola, Annika Nyman, Markus Håkansson, Qinghong Jiang, Sami Franssila, Sakari Kulmala 2002

Mass spectrometry on porous silicon: Desorption/Ionization on Silicon (DIOS)

S. Tuomikoski, K. Huikko, P. Östman, K. Grigoras, Marc Baumann, R. Kostiainen, S. Franssila, T. Kotiaho 2002 Bio Forum International

Modified porous silicon surfaces as DIOS-MS sample plates

S. Tuomikoski, K. Huikko, P. Östman, K. Grigoras, Marc Baumann, R. Kostiainen, S. Franssila, T. Kotiaho 2002

Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS)

S. Tuomikoski, K. Huikko, K Grigoras, P. Östman, T Kotiaho, R. Kostiainen, Marc Baumann, S. Franssila 2002 Lab on a chip

Spectrometrie de mass sur silicum poreux: desorption/ionisation sur silicium (DIOS)

S. Tuomikoski, K. Huikko, P. Östman, K. Grigoras, Marc Baumann, R. Kostiainen, S. Franssila, T. Kotiaho 2002 Bio Forum International

Microsystems education in the Nordic region

F. Grey, S. Franssila, L. Furuberg, K. Hjort 2001

Bulk-Micromachined Silicon Microbridges for Infrared Emitters

Kestutis Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä, Sami Franssila 2001

Plasma etched initial pits for electrochemically etched macroporous silicon structures

Kestutis Grigoras, Antti Niskanen, Sami Franssila 2001 Journal of Micromechanics and Microengineering

PLASMA ETCHED INITIAL PITS FOR MACROPOROUS SILICON STRUCTURES

Kestutis Grigoras, Antti J. Niskanen, Sami Franssila 2001 Journal of Micromechanics and Microengineering

Submicron image reversal by liquid phase deposition of oxide

Antti Niskanen, Sami Franssila 2001 Microelectronic Engineering

Improved neuron MOS-transistor structures for integrated neural network circuits

A. Rantala, S. Franssila, K. Kaski, J. Lampinen, M. Åberg, P. Kuivalainen 2001 IEE Proceedings: Circuits, Devices and Systems

Preparation of porous n-type silicon sample plates for Desorption/Ionization Mass Spectrometry (DIOS MS)

S. Tuomikoski, K. Huikko, K. Grigoras, A. Niskanen, T. Kotiaho, R. Kostiainen, S. Franssila, Marc Baumann 2001 NanoTech2001, Montreux, 27-29.11.2001

Time resolved electrochemiluminoimmunoassay of hCRP at oxide-coated p-type silicon electrodes

P. Vainio, Timo Ala-Kleme, Leif Väre, Markus Håkansson, Philip Canty, J. Eskola, S. Franssila, Sakari Kulmala 2001

Etching through silicon wafer in inductively coupled plasma

S. Franssila, J. Kiihamäki, J. Karttunen 2000 Microsystem Technologies

Deep Silicon Structures by Electrochemical Etching

Kestutis Grigoras, A.J. Niskanen, Sami Franssila 2000

Loading effects in deep silicon etching

J. Karttunen, J. Kiihamäki, S. Franssila 2000 SPIE

Depth and profile control in plasma etched MEMS structures

J. Kiihamäki, H. Kattelus, Jani Karttunen, S. Franssila 2000 Sensors and Actuators

Etching through silicon wafer in inductively coupled plasma

S. Franssila, J. Kiihamäki, J. Karttunen 1999 HARMST'99, Kisarazu, Japan, June 13-15, 1999

Deep silicon etching in inductively coupled plasma reactor for MEMS

J. Kiihamäki, Sami Franssila 1999 Physica Scripta

Depth and profile control in plasma etched MEMS structures

J. Kiihamäki, H. Kattelus, S. Franssila 1999 Transducers'99, Sendai, Japan, June 7-10, 1999

Pattern shape effects and artefacts in deep silicon etching

J. Kiihamäki, Sami Franssila 1999 Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

High-precision neuron MOSFET structures

A. Rantala, S. Franssila, K. Kaski, J. Lampinen, M. Åberg, P. Kuivalainen 1999 Electronics Letters

Valtaavatko mikropiirit elektroniikan?

Sami Franssila 1998 Tiede 2000

Reduction of molybdenum resistivity by a seed layer of Ti-W

Sami Franssila, H. Kattelus, E. Nykänen 1997 Microelectronic Engineering

Variable Threshold (MOS) - Transistor for Integrated Neural Network Circuits

A. Rantala, S. Franssila, K. Kaski, J. Lampinen, M. Åberg 1997 NORCHIP´97, Tanska

Variable Treshold MOS-Transistors for Integrated Neural Network Circuits

A. Rantala, K. Franssila, Kimmo Kaski, J. Lampinen, M. Åberg, P. Kuivalainen 1997 15th Norchip Conference, Tallinn, Estonia, November 10-11, 1997

Tekniikka kuin luonto

Sami Franssila 1996 Tiede 2000

Hospital mouth cleaning aids may cause dental erosion

Jukka Meurman, Rita Sorvari, A. Pelttari, I. Rytömaa, Sami Franssila, L. Kroon, Lars Kroon 1996 SPECIAL CARE IN DENTISTRY

Kuinka pieneksi pii-transistori voidaan kutistaa?

Sami Franssila, Pekka Kuivalainen 1994 Fysiikka tänään

Linewidth uniformity and etch rate uniformity in refractory metal plasma etching

Sami Franssila 1994 Journal of Vacuum Science and Technology

Tungsten silicide formation from sequentially sputtered tungsten and silicon films

J.M. Molarius, S. Franssila, G. Drozdy, J. Saarilahti 1991 Applied Surface Science

Mikroelektroniikan rajat ja reunaehdot

Sami Franssila 1990 Tekniikan Tekijät