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Scanning Electron Microscopes - Comparison of SEMs

Comparison of SEMs

 

JEOL JSM-7500FA

Zeiss Sigma VP

Zeiss EVO HD 15

Emitter

Cold FEG

Schottky FEG

LaB6 "HD"

Detectors

In-column SE
ETSE
BSE (2 segment)
EDX (JEOL)

In-column SE
ETSE
BSE (5 segment)
VPSE
STEM

ETSE
BSE (5 segment)
VPSE
EPSE
STEM

Resolution

0.6 nm @ 30 kV
1.4 nm @ 1 kV

1.3 nm @ 20 kV
2.8 nm @ 1 kV
2.5 nm @ 30 kV (VPSE)

1.9 nm @ 30 kV
8 nm @ 1 kV
3 nm @ 30 kV (VPSE)

Analytical

Yes, EDX

No

No

Variable pressure (VP)

No

Yes, up to 133 Pa (N2)

Yes, up to 133 Pa (H2O or N2)

Environmental (EP)

No

No

Yes, up to 3000 Pa (H2O or N2)

Cooling stage

No

No

Yes

Singal-to-noise ratio comparison between JEOL-7500FA and Zeiss Sigma VP, 9.1.2013. Report (PDF).

Accessories and holder

Tensile tester

Mechanical tester
Kammrath & Weiss
In-situ SEM in Zeiss Sigma

Tensile tester

Mechanical tester
Deben
In-situ SEM in Zeiss Sigma

Sample holders

Planar
Cross-section
Analytical

This service is provided by:

Nanomicroscopy Center

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