General Information
Paper Manuals: cleanroom
Location: Nanotalo cleanroom, room 160d
Contact person: Antti Laitinen
Short description
Sample patterns
- Run file (rf6) and Design CAD file (dc2) for marker array pattern. Read the above User guide for automatic focusing during the patterning.
- Run file (rf6) and Design CAD file (dc2) for example on how to use the NPGS Fracture-mode in writing bigger areas. By Matthias Brandt.
Tutorials
Before:
- Copy all files from the default folder "default-10mm" *Includes all the menu buttons
- Measure the different coarse currents with "Meas Currents" in NPGS *PCD moves in + 30 sec wait => Plate moves to blank position after (will expose)
- Modify your run files by inserting the coarse current parameters
- Set measured currents by choosing the run file in NPGS and press "Set currents" *Currents from the file currents.txt are inserted according to coarse current parameters
- Set measured offsets by choosing the run file in NPGS and press "Set offsets" *Offsets in the file "offsettable.txt" are inserted according to mag and coarse current
During:
- To load Sample, press observation "off" from the JEOL program
- Vent loading chamber (From program or from the loading chamber button "exchange chamber")
- Open the lock to prevent overpressure
- Insert Sample to the holder along the arrows in the holder
- Evacuate the loading chamber
- evac will stop blinking when ready
- Open the deben chamberscope to see the infrared image
- "click for live image"
- Assuming that the stage is in exchange position
- Insert the stick by pushing it in VERTICALLY => Otherwise, vacuum might get lost
- When pulling the stick out, pull all the way
- Press WD = 10.0 mm to move the stage (observe from the camera)
- Press observation "on" when chamber pressure below 1e-3
- If image does not appear, check beam blanker and plate position
- Either, beam blanker in blank position and beam on
- Or, plate position = OUT (not if patterning)
- ACB = Auto Contrast & Brightness
- Move by ball (slowest), mouse (1&2), or specimen stage control buttons (fastest)
- Align the Sample, "Specimen" => "Step Control" => "Specimen Orientation"
- Do coarse focus with stage height control (to keep WD = 10.0mm)
- Focus on dust on the corner of the chip
- To read the focus value, press JEOL Ext. from NPGS =>"Remote", "Connect Socket" => "Control", "Instrument" => Focus value is given in OL
- Do a spot first on the edge near the original focus
- To read the absorbed current => Press "Condition" => Open up the details for the probe current => Press absorbed current and wait for 2-3 seconds
- To burn spot => Move to the place you want to do the spot => Press beam off (If in blanker position) => Set current 1 and magnification 1 000 000x (maximum) => Press cursor and press spot => Press beam back on
- Observe absorbed current and focus to burn the spot => To check the result visually
- Press spot again to return to normal mode
- De-activate freeze by pressing the lighten up button
- => Stigma very easy to set on the spot
- Move to the center of the pattern and burn another spot
- Start patterning
- Set plate position = Blank
- Set beam status = blank
- Let NPGS control the beam from the switch SEM => NPGS
- Right click desired run file => Process run file
- After patterning
- Set coarse current to 1
- Let SEM control the beam from the switch NPGS => SEM
- Move away from the center of the Sample and press beam on
After:
- Set observation "off"
- Press "Exchange position" => Ready when the button lights up
- Move the sample holder to the loading chamber with the rod
- Remember to pull all the way
- Vent the chamber, Open the lock to prevent overpressure
- Take the sample holder out
- Evacuate the loading chamber