Environmental SEM: Zeiss EVO HD15

The EVO HD 15 has an enhanced LaB6 emitter, which provides a good resolution also at low kV. It has three operating modes: high vacuum (HV), variable pressure (VP), and environmental mode (EP). Environmental mode goes up to 2000 Pa for imaging also at humid atmosphere.

Zeiss EVO HD15 Information Card

Manufacturer

Zeiss

Model

EVO HD15

Emitter

LaB6 with "HD" technology

Installation

2012

Detectors

ETSE
BSE (5 segment)
VPSE
EPSE
STEM

Resolution

1.9 nm @ 30 kV
3 nm @ 30 kV (1 nA)
5 nm @ 3 kV
8 nm @ 1 kV
3 nm @ 30 kV (VPSE)

Acceleration voltage

0.2 - 30 kV

Probe current

0.5 pA - 1 uA

Operating modes

High vacuum (10-5 Pa)
Variable pressure (10 - 133 Pa, N2, air, H2O)
Extended pressure (10 - 3000 Pa, N2, air, H2O)

Stage

Motorized 5 axis (compucentric)
X & Y 125 mm
Z 50 mm
T -10 - 90°
R 360°

Specimen size

max. 250 mm diameter
max. 145 mm height

Contact

[email protected]
[email protected]

Pricing

See the current fees.

Availability

The instrument is available for outside users, such as other departments, universities, VTT, and industry.
It is also possible to buy imaging service.
Contact Prof. Janne Ruokolainen for details.

Photos and micrographs

Carbon nanotube film
Zeiss EVO HD15 at Zeiss Cambridge
Sample by M.Sc. Antti Kaskela

Nanocellulose fibrils (no coating)
Zeiss EVO HD15 at Zeiss Cambridge
Sample by M.Sc. Juuso Korhonen

This service is provided by:

Nanomicroscopy Center

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