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Microfabrication

The group develops micro- and nanofabrication processes for applications in fluidic, chemical, biological, mechanical and thermal devices.
Aalto University/Microfabrication

We work on silicon, glass and polymer technologies, utilizing the Micronova cleanroom (http://www.micronova.fi/). Micronova is the largest research cleanroom in northern Europe with its 2600 m2 of class 10-class 1000 space, shared between VTT and Aalto University. Micronova is equipped with a wide range of processing tools for MEMS, CMOS, III-V and polymer technologies.

List of recent publications (research.aalto.fi)  

Microfabrication group is using for example:

  • optical lithography with backside alignment (Süss MA-6)
  • DRIE (Oxford 100 cryo and STS Bosch) and RIE (Oxford 80)
  • PECVD (Oxford 80)
  • ALD (Picosun R200 and Beneq TFS 500 thermal and Beneq TFS 500 plasma)
  • sputtering (various tools) and evaporation (various tools)
  • Centrotherm tube furnaces (thermal oxidation, LPCVD poly, LPCVD nitride)
  • AML bonder/nanoimprint
  • For a complete list of equipment, see: http://www.micronova.fi/nanofabrication_centre-002/equipment/

Materials we work with:

  • Silicon (bulk and SOI), Pyrex, Kapton, Aluminum as substrates
  • AZ positive resists (also with image reversal), SU-8 and NXT15 negative resists
  • PDMS and thiolenes for replica moulding
  • Plasma Teflon and spin coated CYTOP for hydrophobic coatings
  • SAMs made by wet and dry techniques
  • Plasma deposited carbon materials (DLC, nc-C, ta-C)
  • UV-sensitive sol-gel materials (SiO2, Al2O3)
  • ALD films: TiO2, SiO2, Al2O3, TiN, NbN, Pt, nanolaminates
  • Metals (Al, Cr, Cu, W, Pt) by sputtering and evaporation